Electronic Structure and Charge Transport Properties of Amorphous Ta2O5 Films Full article
Journal |
Journal of Non-Crystalline Solids
ISSN: 0022-3093 , E-ISSN: 1873-4812 |
||||||
---|---|---|---|---|---|---|---|
Output data | Year: 2008, Volume: 354, Number: 26, Pages: 3025-3033 Pages count : 9 DOI: 10.1016/j.jnoncrysol.2007.12.013 | ||||||
Tags | Ab initio, Atomic force and scanning tunneling microscopy, Band structure, Dielectric properties, relaxation, electric modulus, Ellipsometry, XPS | ||||||
Authors |
|
||||||
Affiliations |
|
Funding (3)
1 | Siberian Branch of the Russian Academy of Sciences | 97 |
2 | Russian Foundation for Basic Research | 06-02-16621 |
3 | Government of Hong Kong | CityU 121707 |
Abstract:
Amorphous Ta2O5 films were deposited by sputtering Ta onto silicon substrates with reactive ion beam. Electron energy loss spectroscopy measurements on the film found that the plasma oscillation energy is 23.1 eV. The refractive index and the extinction coefficient were measured with spectroscopic ellipsometry over the spectral range of 1.9–4.9 eV. The optical band gap is found to be 4.2 ± 0.05 eV. The valence band consists of three bands separated by ionic gaps. The values of electron effective masses were estimated with DFT quantum-chemical calculation. Experiments on injection of minority carriers from silicon into oxide were also conducted and we found that the electron component of conduction current governed by the electron current in the amorphous Ta2O5.
Cite:
Shvets V.A.
, Aliev V.S.
, Gritsenko D.V.
, Shaimeev S.S.
, Fedosenko E.V.
, Rykhlitski S.V.
, Atuchin V.V.
, Gritsenko V.A.
, Tapilin V.M.
, Wong H.
Electronic Structure and Charge Transport Properties of Amorphous Ta2O5 Films
Journal of Non-Crystalline Solids. 2008. V.354. N26. P.3025-3033. DOI: 10.1016/j.jnoncrysol.2007.12.013 WOS Scopus РИНЦ
Electronic Structure and Charge Transport Properties of Amorphous Ta2O5 Films
Journal of Non-Crystalline Solids. 2008. V.354. N26. P.3025-3033. DOI: 10.1016/j.jnoncrysol.2007.12.013 WOS Scopus РИНЦ
Dates:
Submitted: | Sep 6, 2007 |
Published online: | Mar 4, 2008 |
Published print: | May 15, 2008 |
Identifiers:
Web of science | WOS:000256855200008 |
Scopus | 2-s2.0-42649131357 |
Elibrary | 13596308 |
Chemical Abstracts | 2008:575174 |
Chemical Abstracts (print) | 149:138441 |
OpenAlex | W2029375275 |