Deposition of Ni Thin Films from Ni(II) β-Diketonates Derivatives with 1,3-Diaminopropane Full article
Journal |
Journal of Physics and Chemistry of Solids
ISSN: 0022-3697 |
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Output data | Year: 2013, Volume: 74, Number: 9, Pages: 1204-1211 Pages count : 8 DOI: 10.1016/j.jpcs.2013.03.018 | ||||
Tags | Organometallic compounds, Thin films, Vapour deposition, Ab initio calculations, EXAFS | ||||
Authors |
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Affiliations |
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Funding (4)
1 | The Ministry of Education and Science of the Russian Federation | 14.518.11.7022 |
2 | Siberian Branch of the Russian Academy of Sciences | 64 |
3 | Russian Foundation for Basic Research | 12-03-01039 (01201258422) |
4 | Russian Foundation for Basic Research | 12-03-01154 |
Abstract:
Two octahedral nickel complexes namely Ni(pda)(hfac)2 and Ni(pda)(thd)2 (pda—1,3-diaminopropane, hfac—1,1,1,5,5,5-hexafluoro-2,4-pentanedionato (−), thd—2,2,6,6-tetramethyl-3,5-heptanedionato (−)) were tested in a Metal-Organic Chemical Vapor Deposition (MOCVD) process. Based on density functional theory (DFT) calculations, the thermodynamic stability of molecules in the gas phase was estimated. The intramolecular bond was found in case of complex Ni(pda)(hfac)2. The different fragmentation mechanisms of complexes in the gas phase were examined by double focusing sector (DFS) mass spectrometry. According to TG/DTA analyses and P/T measurements compounds have good volatility. Deposition conditions resulting in one phase Ni films were established. Films compositions and structures were confirmed by XRD, EXAFS, XPS, and SEM. According to XRD and SEM, the average crystallite sizes and thicknesses of films deposited from Ni(pda)(hfac)2 were 12–34 nm and 135–320 nm, whereas from Ni(pda)(thd)2 they were 10–24 nm and 100–380 nm, respectively. The dependences of films thicknesses as a function of substrate temperatures have shown that complex Ni(pda)(hfac)2 is more stable in the gas phase than Ni(pda)(thd)2.
Cite:
Dorovskikh S.I.
, Trubin S.V.
, Filatov E.S.
, Kriventsov V.V.
, Kozlova S.G.
, Shubin Y.V.
, Morozova N.B.
, Igumenov I.K.
Deposition of Ni Thin Films from Ni(II) β-Diketonates Derivatives with 1,3-Diaminopropane
Journal of Physics and Chemistry of Solids. 2013. V.74. N9. P.1204-1211. DOI: 10.1016/j.jpcs.2013.03.018 WOS Scopus РИНЦ
Deposition of Ni Thin Films from Ni(II) β-Diketonates Derivatives with 1,3-Diaminopropane
Journal of Physics and Chemistry of Solids. 2013. V.74. N9. P.1204-1211. DOI: 10.1016/j.jpcs.2013.03.018 WOS Scopus РИНЦ
Dates:
Submitted: | Jul 19, 2012 |
Accepted: | Mar 20, 2013 |
Published online: | Mar 30, 2013 |
Published print: | Sep 1, 2013 |
Identifiers:
Web of science | WOS:000320492900003 |
Scopus | 2-s2.0-84878328506 |
Elibrary | 20435886 |
Chemical Abstracts | 2013:668806 |
Chemical Abstracts (print) | 159:270421 |
OpenAlex | W2023203094 |