Spectroscopic Ellipsometry and X-Ray Photoelectron Spectroscopy of La2O3 Thin Films Deposited by Reactive Magnetron Sputtering Full article
Journal |
Journal of Vacuum Science & Technology A-Vacuum Surfaces And Films
ISSN: 0734-2101 |
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Output data | Year: 2011, Volume: 29, Article number : 021004, Pages count : 5 DOI: 10.1116/1.3539069 | ||||||||
Tags | Chemical analysis; Lanthanum oxides; Optical variables control; Photoelectricity; Photons; Refractive index; Spectroscopic ellipsometry; Substrates | ||||||||
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Abstract:
Lanthanum oxide (La2O3)films were grown by the reactive dc magnetron sputtering and studied their structural, chemical and optical parameters. La2O3films were deposited onto Si substrates by sputtering La-metal in a reactive gas (Ar+O2) mixture at a substrate temperature of 200 °C. Reflection high-energy electron diffraction measurements confirm the amorphous state of La2O3films. Chemical analysis of the top-surface layers evaluated with x-ray photoelectron spectroscopy indicates the presence of a layer modified by hydroxylation due to interaction with atmosphere. Optical parameters of a-La2O3 were determined with spectroscopic ellipsometry (SE). There is no optical absorption over spectral range λ=250–1100 nm. Dispersion of refractive index of a-La2O3 was defined by fitting of SE parameters over λ=250–1100 nm
Cite:
Atuchin V.V.
, Kalinkin A.V.
, Kochubey V.A.
, Kruchinin V.N.
, Vemuri R.S.
, Ramana C.V.
Spectroscopic Ellipsometry and X-Ray Photoelectron Spectroscopy of La2O3 Thin Films Deposited by Reactive Magnetron Sputtering
Journal of Vacuum Science & Technology A-Vacuum Surfaces And Films. 2011. V.29. 021004 :1-5. DOI: 10.1116/1.3539069 WOS Scopus РИНЦ
Spectroscopic Ellipsometry and X-Ray Photoelectron Spectroscopy of La2O3 Thin Films Deposited by Reactive Magnetron Sputtering
Journal of Vacuum Science & Technology A-Vacuum Surfaces And Films. 2011. V.29. 021004 :1-5. DOI: 10.1116/1.3539069 WOS Scopus РИНЦ
Dates:
Submitted: | Oct 12, 2010 |
Accepted: | Dec 18, 2010 |
Published online: | Jan 19, 2011 |
Published print: | Mar 1, 2011 |
Identifiers:
Web of science | WOS:000288028000005 |
Scopus | 2-s2.0-79952409714 |
Elibrary | 16873330 |
Chemical Abstracts | 2011:272433 |
Chemical Abstracts (print) | 156:243449 |
OpenAlex | W1967338403 |