New Technique for Heterogeneous Vapor-Phase Synthesis of Nanostructured Metal Layers from Low-Dimensional Volatile Metal Complexes Full article
Journal |
Technical Physics
ISSN: 1063-7842 , E-ISSN: 1090-6525 |
||||||
---|---|---|---|---|---|---|---|
Output data | Year: 2011, Volume: 56, Number: 9, Pages: 1333-1338 Pages count : 6 DOI: 10.1134/S1063784211090039 | ||||||
Tags | Quartz Substrate; Metallic Copper; Auger Parameter; Metal Organic Compound; Volatile Precursor | ||||||
Authors |
|
||||||
Affiliations |
|
Abstract:
A new technique for depositing thin nanostructured layers on semiconductor and insulating substrates that is based on heterogeneous gas-phase synthesis from low-dimensional volatile metal complexes is suggested and tried out. Thin nanostructured copper layers are deposited on silicon and quartz substrates from low-dimensional formate complexes using a combined synthesis-mass transport process. It is found that copper in layers thus deposited is largely in a metal state (Cu0) and has the form of closely packed nanograins with a characteristic structure.
Cite:
Badalyan A.M.
, Bakhturova L.F.
, Kaichev V.V.
, Polyakov O.V.
, Pchelyakov O.P.
, Smirnov G.I.
New Technique for Heterogeneous Vapor-Phase Synthesis of Nanostructured Metal Layers from Low-Dimensional Volatile Metal Complexes
Technical Physics. 2011. V.56. N9. P.1333-1338. DOI: 10.1134/S1063784211090039 WOS Scopus РИНЦ
New Technique for Heterogeneous Vapor-Phase Synthesis of Nanostructured Metal Layers from Low-Dimensional Volatile Metal Complexes
Technical Physics. 2011. V.56. N9. P.1333-1338. DOI: 10.1134/S1063784211090039 WOS Scopus РИНЦ
ArticleLinkType.TRANSLATED_TO_ORIGINAL:
Бадалян А.М.
, Бахтурова Л.Ф.
, Каичев В.В.
, Поляков О.В.
, Пчеляков О.П.
, Смирнов Г.И.
Новая технология газогетерогенного синтеза наноструктурированных металлических слоев из малоразмерных летучих металлокомплексов
Журнал технической физики. 2011. Т.81. №9. С.113-118. РИНЦ
Новая технология газогетерогенного синтеза наноструктурированных металлических слоев из малоразмерных летучих металлокомплексов
Журнал технической физики. 2011. Т.81. №9. С.113-118. РИНЦ
Dates:
Submitted: | Nov 29, 2010 |
Published print: | Sep 1, 2011 |
Published online: | Sep 18, 2011 |
Identifiers:
Web of science | WOS:000295695800020 |
Scopus | 2-s2.0-80052891313 |
Elibrary | 18005986 |
Chemical Abstracts | 2011:1180100 |
Chemical Abstracts (print) | 156:316836 |
OpenAlex | W2095194728 |