Nanoscale Potential Fluctuation in Non-Stoichiometric Hafnium Suboxides Full article
Conference |
228th Fall Meeting of Electrochemical Society (ECS 2015 Phoenix) 11-15 Oct 2015 , Phoenix |
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Journal |
ECS Transactions
ISSN: 1938-5862 , E-ISSN: 1938-6737 |
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Output data | Year: 2015, Volume: 69, Number: 5, Pages: 237-241 Pages count : 5 DOI: 10.1149/06905.0237ecst | ||||||||
Tags | Nanoelectronics; Spectroscopic ellipsometry; X ray photoelectron spectroscopy | ||||||||
Authors |
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Affiliations |
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Funding (1)
1 | Russian Science Foundation | 14-19-00192 |
Abstract:
We study the structure of nonstoichiometric HfOx films with variable composition using methods of X-ray photoelectron spectroscopy and spectroscopic ellipsometry. HfOx, to a first approximation, is a mixture of HfO2 and Hf metal with a small amount (~10–15%) of hafnium sub-oxide HfOy (y < 2).
Cite:
Orlov O.M.
, Krasnikov G.Y.
, Gritsenko V.A.
, Kruchinin V.N.
, Perevalov T.V.
, Aliev V.S.
, Islamov D.R.
, Prosvirin I.P.
Nanoscale Potential Fluctuation in Non-Stoichiometric Hafnium Suboxides
ECS Transactions. 2015. V.69. N5. P.237-241. DOI: 10.1149/06905.0237ecst Scopus РИНЦ
Nanoscale Potential Fluctuation in Non-Stoichiometric Hafnium Suboxides
ECS Transactions. 2015. V.69. N5. P.237-241. DOI: 10.1149/06905.0237ecst Scopus РИНЦ
Dates:
Published print: | Oct 2, 2015 |
Published online: | Oct 2, 2015 |
Identifiers:
Scopus | 2-s2.0-84946014022 |
Elibrary | 24968127 |
Chemical Abstracts | 2017:450480 |
OpenAlex | W2226351772 |