Boron Nitride Films Prepared by Remote Plasma-Enhanced Chemical Vapour Deposition from Borazine (B3N3H6) Научная публикация
Журнал |
Thin Solid Films
ISSN: 0040-6090 |
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Вых. Данные | Год: 1994, Том: 237, Номер: 1-2, Страницы: 32-37 Страниц : 6 DOI: 10.1016/0040-6090(94)90235-6 | ||
Ключевые слова | Bonding; Boron compounds; Chemical vapor deposition; Film growth; Infrared spectroscopy; Mixing; Nitrogen; Plasma applications; Substrates | ||
Авторы |
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Организации |
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Реферат:
The quality of boron nitride thin films prepared by remote plasma-enhanced chemical vapour deposition, using borazine as a precursor substance, have been analysed based on IR spectra. The process for the film deposition consists of a noble gas or nitrogen excitation in an r.f. plasma; transport of the excited gas out of the plasma region; mixing of it with the neutral molecules of borazine out of the plasma region to form precursor species; and a reaction at a heated substrate to form the films. It was shown that the use of different r.f. excited gases leads to qualitatively different local bonding in the deposited films. An empirical equation to describe the growth velocity of a film was obtained.
Библиографическая ссылка:
Smirnova T.P.
, Jakovkina L.V.
, Jashkin I.L.
, Sysoeva N.P.
, Amosov J.I.
Boron Nitride Films Prepared by Remote Plasma-Enhanced Chemical Vapour Deposition from Borazine (B3N3H6)
Thin Solid Films. 1994. V.237. N1-2. P.32-37. DOI: 10.1016/0040-6090(94)90235-6 WOS Scopus РИНЦ
Boron Nitride Films Prepared by Remote Plasma-Enhanced Chemical Vapour Deposition from Borazine (B3N3H6)
Thin Solid Films. 1994. V.237. N1-2. P.32-37. DOI: 10.1016/0040-6090(94)90235-6 WOS Scopus РИНЦ
Даты:
Поступила в редакцию: | 6 нояб. 1992 г. |
Принята к публикации: | 6 июл. 1993 г. |
Опубликована в печати: | 1 янв. 1994 г. |
Опубликована online: | 18 сент. 2002 г. |
Идентификаторы БД:
Web of science | WOS:A1994MP77200008 |
Scopus | 2-s2.0-0028272601 |
РИНЦ | 31135764 |
Chemical Abstracts | 1994:142044 |
Chemical Abstracts (print) | 120:142044 |
OpenAlex | W2043012222 |