First-Principle Study of Phosphine Adsorption on Si(001)-2x1-Cl Научная публикация
Журнал |
The Journal of Physical Chemistry C
ISSN: 1932-7447 , E-ISSN: 1932-7455 |
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Вых. Данные | Год: 2018, Том: 122, Номер: 3, Страницы: 1741-1745 Страниц : 5 DOI: 10.1021/acs.jpcc.7b11519 | ||||
Ключевые слова | CHLORINE; SI(100) | ||||
Авторы |
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Организации |
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Информация о финансировании (1)
1 | Российский научный фонд | 16-12-00050 |
Реферат:
Abstract This paper presents a DFT study for phosphine adsorption on a Si(001)-2×1 surface covered by a chlorine monolayer, including adsorption on local defects, i.e. mono- and bivacancies in the adsorbate layer (Cl, Cl2), and combined vacancies with removed silicon atoms (SiCl, SiCl2). Activation barriers were found for the adsorbing PH3 to dissociate into PH2+H and PH+H2 fragments; it was also established that phosphine dissociation on combined vacancies is possible at room temperature. If there is a silicon vacancy on the surface, phosphorus settles in the Si(001) lattice as PH (if the vacancy is SiCl) or as PH2 (if the vacancy is SiCl2). This paper suggests a method to plant a separate phosphorus atom into the silicon surface layer with atomic precision, using phosphine adsorption on defects specially created on a Si(001)2×1-Cl surface with an STM tip.
Библиографическая ссылка:
Pavlova T.V.
, Zhidomirov G.M.
, Eltsov K.N.
First-Principle Study of Phosphine Adsorption on Si(001)-2x1-Cl
The Journal of Physical Chemistry C. 2018. V.122. N3. P.1741-1745. DOI: 10.1021/acs.jpcc.7b11519 WOS Scopus РИНЦ
First-Principle Study of Phosphine Adsorption on Si(001)-2x1-Cl
The Journal of Physical Chemistry C. 2018. V.122. N3. P.1741-1745. DOI: 10.1021/acs.jpcc.7b11519 WOS Scopus РИНЦ
Файлы:
Полный текст от издателя
Даты:
Поступила в редакцию: | 22 нояб. 2017 г. |
Принята к публикации: | 28 дек. 2017 г. |
Опубликована online: | 28 дек. 2017 г. |
Опубликована в печати: | 25 янв. 2018 г. |
Идентификаторы БД:
Web of science | WOS:000423652700032 |
Scopus | 2-s2.0-85041177826 |
РИНЦ | 35538141 |
Chemical Abstracts | 2018:15694 |
Chemical Abstracts (print) | 169:34705 |
OpenAlex | W2780478410 |