Thermal and Plasma Chemical Copper Films Deposition Using Modified CVD Method - Combined Synthesis-Transport Technique Доклады на конференциях
Язык | Английский | ||||
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Тип доклада | Стендовый | ||||
Конференция |
Euro CVD 19 Conference (EuroCVD19) 02-06 сент. 2013 , Varna |
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Авторы |
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Организации |
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Библиографическая ссылка:
Polyakov M.S.
, Badalian A.M.
, Kaichev V.V.
, Igumenov I.K.
Thermal and Plasma Chemical Copper Films Deposition Using Modified CVD Method - Combined Synthesis-Transport Technique
Euro CVD 19 Conference (EuroCVD19) 02-06 Sep 2013
Thermal and Plasma Chemical Copper Films Deposition Using Modified CVD Method - Combined Synthesis-Transport Technique
Euro CVD 19 Conference (EuroCVD19) 02-06 Sep 2013