Fabrication and Performance Characteristics of a Ni/C Multilayer Grating for Hard X-Rays Full article
Conference |
10th National Synchrotron Radiation Conference 11-15 Jul 1994 , Новосибирск |
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Journal |
Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002 |
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Output data | Year: 1995, Volume: 359, Number: 1-2, Pages: 138-140 Pages count : 3 DOI: 10.1016/0168-9002(94)01679-8 | ||||||
Authors |
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Affiliations |
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Funding (2)
1 | Russian Foundation for Basic Research | 93-02-3944 |
2 | Russian Foundation for Basic Research | 93-02-3942 |
Abstract:
We have fabricated and tested a lamella multilayer grating for the hard X-ray range with a grating period of 0.97 μm and a NiC multilayer period of 4.0 nm. To obtain large size gratings the fabrication process included holographic lithography and ion-beam etching. The reflectivity measurements obtained using a triple-axis diffractometer have shown that the diffraction efficiency and the relative intensities of the diffracted orders strongly depend on the incident angle. A very encouraging result is the possibility to direct practically all diffracted energy to any one first order with total suppression of the other orders.
Cite:
Chernov V.A.
, Chkhalo N.I.
, Kovalenko N.V.
, Mytnichenko S.V.
Fabrication and Performance Characteristics of a Ni/C Multilayer Grating for Hard X-Rays
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.138-140. DOI: 10.1016/0168-9002(94)01679-8 WOS Scopus РИНЦ
Fabrication and Performance Characteristics of a Ni/C Multilayer Grating for Hard X-Rays
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.138-140. DOI: 10.1016/0168-9002(94)01679-8 WOS Scopus РИНЦ
Dates:
Published print: | May 1, 1995 |
Published online: | Feb 23, 2000 |
Identifiers:
Web of science | WOS:A1995QY84500033 |
Scopus | 2-s2.0-0009516260 |
Elibrary | 30810109 |
Chemical Abstracts | 1995:539460 |
Chemical Abstracts (print) | 122:325881 |
OpenAlex | W2089284905 |