Composition and Structure of Hafnia Films on Silicon Full article
Journal |
Inorganic Materials
ISSN: 0020-1685 , E-ISSN: 1608-3172 |
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Output data | Year: 2008, Volume: 44, Number: 9, Pages: 965-970 Pages count : 6 DOI: 10.1134/S0020168508090124 | ||||||||
Tags | Hafnium; Native Oxide Layer; Ellipsometry Data; Hafnium Silicate; Equilibrium Phase Assemblage | ||||||||
Authors |
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Affiliations |
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Funding (3)
1 | Council for Grants of the President of the Russian Federation | НШ-636.2008.3 |
2 | Siberian Branch of the Russian Academy of Sciences | 97 |
3 | Russian Foundation for Basic Research | 05-03-32393 |
Abstract:
Ellipsometry, electron microscopy, and x-ray photoelectron spectroscopy data indicate that, during
HfO2 deposition onto silicon, the native oxide reacts with the HfO2 deposit to form an amorphous intermediate
layer which differs in refractive index (1.6) from both HfO2 (1.9–2.0) and SiO2 (1.46). Thermodynamic analysis
of the Si–SiO2–HfO2–Hf system shows that Si is in equilibrium with Si/HfO2 – y only at low oxygen pressures.
Starting at a certain oxygen pressure (equivalent to the formation of a native oxide layer), the equilibrium
phase assemblage is Si/HfSiO4/HfO2 – y.
Cite:
Smirnova T.P.
, Kaichev V.V.
, Yakovkina L.V.
, Kosyakov V.I.
, Beloshapkin S.A.
, Kuznetsov F.A.
, Lebedev M.S.
, Gritsenko V.A.
Composition and Structure of Hafnia Films on Silicon
Inorganic Materials. 2008. V.44. N9. P.965-970. DOI: 10.1134/S0020168508090124 WOS Scopus РИНЦ
Composition and Structure of Hafnia Films on Silicon
Inorganic Materials. 2008. V.44. N9. P.965-970. DOI: 10.1134/S0020168508090124 WOS Scopus РИНЦ
Original:
Смирнова Т.П.
, Каичев В.В.
, Яковкина Л.В.
, Косяков В.И.
, Белошапкин С.А.
, Кузнецов Ф.А.
, Лебедев М.С.
, Гриценко В.А.
Состав и строение пленок оксида гафния на кремнии
Неорганические материалы. 2008. Т.44. №9. С.1086-1092. РИНЦ
Состав и строение пленок оксида гафния на кремнии
Неорганические материалы. 2008. Т.44. №9. С.1086-1092. РИНЦ
Dates:
Submitted: | Oct 11, 2006 |
Accepted: | Jun 22, 2007 |
Published online: | Aug 30, 2008 |
Published print: | Sep 1, 2008 |
Identifiers:
Web of science | WOS:000258839600012 |
Scopus | 2-s2.0-50849105104 |
Elibrary | 13593266 |
Chemical Abstracts | 2008:1055854 |
Chemical Abstracts (print) | 150:110130 |
OpenAlex | W2076961298 |