Atomic and Electronic Structure of Ferroelectric La-Doped HfO2 Films Full article
Journal |
Materials Research Express
, E-ISSN: 2053-1591 |
||||||||
---|---|---|---|---|---|---|---|---|---|
Output data | Year: 2019, Volume: 6, Number: 3, Article number : 036403, Pages count : 7 DOI: 10.1088/2053-1591/aaf436 | ||||||||
Tags | hafnium oxide, photoelectron spectra, HRTEM, specroellipsometry, DFT, oxygen vacancy, FRAM | ||||||||
Authors |
|
||||||||
Affiliations |
|
Funding (2)
1 | Russian Science Foundation | 14-22-00143 |
2 | Russian Science Foundation | 14-19-00192 |
Abstract:
The atomic structure and optical properties of ferroelectric La-doped hafnium oxide (La:HfO2) thin films grown by the plasma-assisted atomic layer deposition were investigated. Using high resolution transmission electron microscopy, it was shown that the studied La:HfO2 film has a orthorhombic polar structure with the Pmn21 space group. It was found that the film exhibits ferroelectric properties. By means of x-ray photoelectron spectroscopy and specroellipsometry it was established that La:HfO2 consists of the HfO2 and La2O3 phases mixture. The specroellipsometry analysis with the Bruggeman effective medium approximation showed that the investigated La:HfO2 consists of 88% HfO2 and 12% La2O3. It is shown that etching La:HfO2 with argon ions leads to the oxygen vacancies generation in the near-surface region. These vacancies are generated mainly due to the knocking out of oxygen atoms to the interstitial positions, and the following annealing at 700 °C in vacuum for 1 h leads to the annihilation of that Frenkel defects.
Cite:
Perevalov T.V.
, Gutakovskii A.K.
, Kruchinin V.N.
, Gritsenko V.A.
, Prosvirin I.P.
Atomic and Electronic Structure of Ferroelectric La-Doped HfO2 Films
Materials Research Express. 2019. V.6. N3. 036403 :1-7. DOI: 10.1088/2053-1591/aaf436 WOS Scopus РИНЦ
Atomic and Electronic Structure of Ferroelectric La-Doped HfO2 Films
Materials Research Express. 2019. V.6. N3. 036403 :1-7. DOI: 10.1088/2053-1591/aaf436 WOS Scopus РИНЦ
Dates:
Submitted: | Nov 14, 2018 |
Accepted: | Nov 27, 2018 |
Published online: | Dec 5, 2018 |
Published print: | Mar 1, 2019 |
Identifiers:
Web of science | WOS:000452701300003 |
Scopus | 2-s2.0-85059244428 |
Elibrary | 38635371 |
Chemical Abstracts | 2019:836529 |
OpenAlex | W2902290026 |