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Optical Properties and Charge Transport of Textured Sc2O3 Thin Flms Obtained by Atomic Layer Deposition Full article

Общее Language: Английский, Genre: Full article,
Status: Published, Source type: Original
Journal Applied Surface Science
ISSN: 0169-4332
Output data Year: 2019, Volume: 478, Pages: 690-698 Pages count : 9 DOI: 10.1016/j.apsusc.2019.01.288
Tags Scandium oxide; Atomic layer deposition; Bixbyite; Refractive index; Charge transport
Authors Lebedev M.S. 1 , Kruchinin V.N. 2 , Afonin M.Yu. 1 , Korolkov I.V. 1,4 , Saraev A.A. 3,4 , Gismatulin A.A. 2 , Gritsenko V.A. 2,4,5
Affiliations
1 Nikolaev Institute of Inorganic Chemistry SB RAS, 3 Ac. Lavrentyev Ave., 630090 Novosibirsk, Russia
2 Rzhanov Institute of Semiconductor Physics SB RAS, 13 Ac. Lavrentyev Ave, 630090 Novosibirsk, Russia
3 Boreskov Institute of Catalysis SB RAS, 5 Ac. Lavrentyev Ave., 630090 Novosibirsk, Russia
4 Novosibirsk State University, 2 Pirogov Str., 630090 Novosibirsk, Russia
5 Novosibirsk State Technical University, 20 Marx Ave., 630073 Novosibirsk, Russia

Funding (1)

1 Russian Foundation for Basic Research 18-53-52009 (АААА-А18-118013190038-3)

Abstract: Scandium oxide films with thickness d = 20–100 nm were deposited by atomic layer deposition (ALD) using tris(methylcyclopentadienyl) scandium (III) Sc(MeCp)3 and water vapors as precursors at reactor temperature range of 200–400 °C. The ALD-window was detected in the range of 230–370 °C. Growth per cycle remained constant and was 0.080–0.084 nm/cycle in this range. O/Sc ratio was found to be 1.49 which is close to stoichiometric Sc2O3. The films were polycrystalline. The grains were more apparent for the films grown at higher temperatures. The grain size increased with thickness. Cubic Sc2O3 phase was determined by FTIR, Raman spectroscopy and X-rays diffraction. In general, different crystallographic directions are more preferential for different process conditions. Films were textured and their growth occurred mainly in the (400) direction. The refractive index dispersions of deposited films were well described by the Cauchy model. Optical properties depended weakly on process parameters (temperature or thickness). As it was detected for the films with close thickness the refractive index slightly increased with deposition temperature increase. The Nasyrov-Gritsenko (N-G) multiphonon trap ionization model well describes the charge transport. The trap parameters were determined to be: concentration N = 1.5 × 1019 cm−3, thermal energy Wt = 0.83 eV, and optical energy
Cite: Lebedev M.S. , Kruchinin V.N. , Afonin M.Y. , Korolkov I.V. , Saraev A.A. , Gismatulin A.A. , Gritsenko V.A.
Optical Properties and Charge Transport of Textured Sc2O3 Thin Flms Obtained by Atomic Layer Deposition
Applied Surface Science. 2019. V.478. P.690-698. DOI: 10.1016/j.apsusc.2019.01.288 publication_identifier_short.wos_identifier_type publication_identifier_short.scopus_identifier_type publication_identifier_short.rinz_identifier_type
Dates:
Submitted: Nov 28, 2018
Accepted: Jan 30, 2019
Published online: Jan 31, 2019
Published print: Jun 1, 2019
Identifiers:
publication_identifier.wos_identifier_type WOS:000461150400081
publication_identifier.scopus_identifier_type 2-s2.0-85061210277
publication_identifier.rinz_identifier_type 38681971
publication_identifier.accession_number_identifier_type 2019:277094
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