Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography
Full article
| Common |
Language:
Английский,
Genre:
Full article,
Status:
Published,
Source type:
Translated
|
| Journal |
Optoelectronics, Instrumentation and Data Processing
ISSN: 8756-6990
, E-ISSN: 1934-7944
|
| Output data |
Year: 2019,
Volume: 55,
Number: 2,
Pages: 115–125
Pages count
: 11
DOI:
10.3103/S875669901902002X
|
| Tags |
deep X-ray lithography; LIGA technology; microstructures; quasi-optical filters; terahertz range |
| Authors |
Gentselev A.N.
1
,
Kuznetsov S.A.
1,2,3
,
Dultsev F.N.
3,4
,
Goldenberg B.G.
1
,
Zelinsky A.G.
5
,
Kondratyev V.I.
1
,
Tanygina D.S.
2,6
|
| Affiliations |
| 1 |
Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrentieva 11, Novosibirsk, 630090 Russia
|
| 2 |
Novosibirsk Department of Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, “Design and Technology Institute of Applied Microelectronics”, pr. Akademika Lavrentieva 2/1, Novosibirsk, 630090 Russia
|
| 3 |
Novosibirsk State University, ul. Pirogova 2, Novosibirsk, 630090 Russia
|
| 4 |
dRzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrentieva 13, Novosibirsk, 630090 Russia
|
| 5 |
Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, ul. Kutateladze 18, Novosibirsk, 630128 Russia
|
| 6 |
Far Eastern Federal University, ul. Sukhanova 8, Vladivostok, 690091 Russia
|
|
A method for fabricating high-pass terahertz quasi-optical filters in the form of thick (up to 1 mm in thickness) self-bearing copper microstructures of subwavelength topology is described. This method is based on forming a high-aspect-ratio mask of SU-8 resist on a silicon wafer via deep X-ray lithography through a tungsten X-ray mask followed by electroplating a copper layer through the resistive mask. An example of a 212-µm thick structure with a cutoff frequency of 0.42 THz having the geometry of hexagon-shaped through-holes arranged on a triangular lattice is considered. The results of broadband THz characterization and electromagnetic analysis of the structure fabricated are presented.