Chemical Structure and Functional Properties of Amorphous Boron Carbonitride Films
Full article
| Common |
Language:
Английский,
Genre:
Full article,
Status:
Published,
Source type:
Translated
|
| Journal |
Journal of Structural Chemistry
ISSN: 0022-4766
, E-ISSN: 1573-8779
|
| Output data |
Year: 2021,
Volume: 62,
Number: 8,
Pages: 1309-1324
Pages count
: 16
DOI:
10.1134/S0022476621080187
|
| Tags |
boron carbonitride; magnetron sputtering; mechanical properties; optical properties; surface wettability; thin films |
| Authors |
Sulyaeva V.S.
1
,
Gatapova E.Ya.
2
,
Kozhevnikov A.K.
1
,
Rogilo D.I.
3
,
Saraev A.A.
4
,
Yushina I.V.
1
,
Khomyakov M.N.
5
,
Shapovalova A.A.
1
,
Shayapov V.R.
1
,
Bhaskar N.
6
,
Tu R.
7
,
Kosinova M.L.
1
|
| Affiliations |
| 1 |
Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
|
| 2 |
Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
|
| 3 |
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
|
| 4 |
Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
|
| 5 |
Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
|
| 6 |
Indian Institute of Science, Bangalore, India
|
| 7 |
Wuhan University of Technology, Wuhan, China
|
|
Funding (2)
|
1
|
Russian Foundation for Basic Research
Department of Science and Technology
|
18-53-80016 (АААА-А18-118091290003-8) / DST/IMRCD/BRICS/PilotCall2/SCBCPCVD/2018
|
|
2
|
Ministry of Science and Higher Education of the Russian Federation
|
FWUZ-2021-0006 (121031700314-5)
|
We report a comprehensive study of the effect of the chemical structure of boron carbonitride films on the variability of their functional characteristics. The BCxNy films are prepared on Si(100) and fused silica substrates by reactive magnetron sputtering of a B4C target in an argon/nitrogen mixture. The deposition rate, elemental composition, and types of chemical bonds in the films is studied depending on the nitrogen content in the gas mixture. Optical (refractive index, transmission coefficient, band gap) and mechanical (hardness, Young′s modulus, substrate adhesion) characteristics are investigated depending on the deposition parameters and the chemical structure of the films. Particular attention is paid to the surface properties of the BCxNy films (morphology, roughness, contact angle, and surface free energy). Stability of the BCxNy films upon storage in air is studied for the first time. The data obtained for the composition, structural characteristics, and some functional properties of the BCxNy films are compared with those reported in literature. © 2021, Pleiades Publishing, Ltd.