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Silicon Carbonitride Films as a Promising Material Synthesized from New Sources Full article

Общее Language: Английский, Genre: Full article,
Status: Published, Source type: Translated
Journal Chemistry for Sustainable Development
ISSN: 1817-1818
Output data Year: 2001, Volume: 9, Number: 7, Pages: 23-29 Pages count : 7
Authors Smirnova Tamara P. 1 , Badalyan Aram M. 1 , Yakovkina Lyubov V. 1 , Sysoeva Natalia P. 1 , Asanov Igor P. 1 , Kaichev Vasily V. 2 , Bukhtiyarov Valery I. 2 , Shmakov Alexander N. 2 , Rakhlin Vladimir I. 3 , Fomina Anna N. 3
Affiliations
1 Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 3, Novosibirsk 630090 (Russia)
2 G. K. Boreskov Institute of Catalysis, Siberian Branch of the Russian Academy of Sciences, Pr. Akademika Lavrentyeva 5, Novosibirsk 630090 (Russia)
3 A. A. Favorsky Institute of Chemistry, Siberian Branch of the Russian Academy of Sciences, Ul. Favorskogo 1, Irkutsk 664033 (Russia)

Abstract: Silicon carbonitride films were synthesized by means of the chemical vapour deposition (CVD) process in the scheme with remote plasma. Initial compounds were the silyl derivatives of 1,1-dimethyl hydrazine: dimethyl(2,2-dimethylhydrazino)-silane and dimethyl-bis-(2,2-dimethylhydrazino)silane. The molecules of the monomers contain the bonds Si-N, Si-C and C-N which are necessary for the formation of silicon carbonitride.
Cite: Smirnova T.P. , Badalyan A.M. , Yakovkina L.V. , Sysoeva N.P. , Asanov I.P. , Kaichev V.V. , Bukhtiyarov V.I. , Shmakov A.N. , Rakhlin V.I. , Fomina A.N.
Silicon Carbonitride Films as a Promising Material Synthesized from New Sources
Chemistry for Sustainable Development. 2001. V.9. N7. P.23-29. publication_identifier_short.rinz_identifier_type
ArticleLinkType.TRANSLATED_TO_ORIGINAL: Смирнова Т.П. , Бадалян А.М. , Яковкина Л.В. , Сысоева Н.П. , Асанов И.П. , Каичев В.В. , Бухтияров В.И. , Шмаков А.Н. , Рахлин В.И. , Фомина А.Н.
Пленки карбонитрида кремния - перспективный функциональный материал, синтезированный из новых источников
Химия в интересах устойчивого развития. 2001. Т.9. №7. С.857-864. publication_identifier_short.rinz_identifier_type
Identifiers:
publication_identifier.rinz_identifier_type 30644034