Synthesis of Si–C–N–Fe Layers from Volatile Organosilicon Precursors and Ferrocene. Part I. Synthesis, Chemical and Phase Composition of IronContaining Layers Prepared by Thermal Decomposition of Ferrocene Full article
Journal |
Glass Physics and Chemistry
ISSN: 1087-6596 , E-ISSN: 1608-313X |
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Output data | Year: 2015, Volume: 41, Number: 6, Pages: 630-636 Pages count : 7 DOI: 10.1134/S1087659615060048 | ||||||
Tags | chemical deposition of films from gas phase under reduced pressure, ferrocene, iron silicide, thermodynamic modeling | ||||||
Authors |
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Affiliations |
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Funding (1)
1 | The Ministry of Education and Science of the Russian Federation |
Abstract:
Thermodynamic modeling of system Fe–C–H–He at total pressure = 10–2–10 Torr in the temperature range of 300–1300 K has been carried out to determine the conditions in which the ironcontaining layers can be synthesized from a gaseous mixture of ferrocene (C5H5)2Fe and helium He. Using the results of thermodynamic modeling we have developed a process for the deposition of ironcontaining layers during hightemperature decomposition of the initial gas mixture (C5H5)2Fe + He in the temperature range of 1073–1273 K. The synthesized ironcontaining layers have been characterized using the following methods: Raman spectroscopy, FTIR spectroscopy, energydispersive spectroscopy, Xray photoelectron spectroscopy, Xray diffraction with synchrotron radiation, as well as scanning electron and atomic force microscopy. It has been found that using silicon substrate Si(100), phases of iron silicide and carbon nanotubes are formed in the ironcontaining layers, and when using substrates of fused silica—a mixture of iron carbide, iron sili
cide, and carbon nanotubes. Films consisting of iron carbide and carbon materials are deposited on sapphire
substrates.
Cite:
Fainer N.I.
, Pushkarev R.V.
, Golubenko A.N.
, Rumyantsev Y.M.
, Maksimovskii E.A.
, Kaichev V.V.
Synthesis of Si–C–N–Fe Layers from Volatile Organosilicon Precursors and Ferrocene. Part I. Synthesis, Chemical and Phase Composition of IronContaining Layers Prepared by Thermal Decomposition of Ferrocene
Glass Physics and Chemistry. 2015. V.41. N6. P.630-636. DOI: 10.1134/S1087659615060048 WOS Scopus РИНЦ
Synthesis of Si–C–N–Fe Layers from Volatile Organosilicon Precursors and Ferrocene. Part I. Synthesis, Chemical and Phase Composition of IronContaining Layers Prepared by Thermal Decomposition of Ferrocene
Glass Physics and Chemistry. 2015. V.41. N6. P.630-636. DOI: 10.1134/S1087659615060048 WOS Scopus РИНЦ
Original:
Файнер Н.И.
, Пушкарев Р.В.
, Голубенко А.Н.
, Румянцев Ю.М.
, Максимовский Е.А.
, Каичев В.В.
Синтез слоев Si-C-N-Fe из летучих кремнийорганических веществ-предшественников и ферроцена. Часть I. Синтез, химический и фазовый состав железосодержащих слоев, полученных термическим разложением ферроцена
Физика и химия стекла. 2015. Т.41. №6. С.851-860. РИНЦ
Синтез слоев Si-C-N-Fe из летучих кремнийорганических веществ-предшественников и ферроцена. Часть I. Синтез, химический и фазовый состав железосодержащих слоев, полученных термическим разложением ферроцена
Физика и химия стекла. 2015. Т.41. №6. С.851-860. РИНЦ
Dates:
Submitted: | Dec 16, 2014 |
Published print: | Nov 1, 2015 |
Published online: | Dec 6, 2015 |
Identifiers:
Web of science | WOS:000365805000011 |
Scopus | 2-s2.0-84948988390 |
Elibrary | 26772279 |
Chemical Abstracts | 2015:1962810 |
OpenAlex | W2186919141 |