Formation of Small Volatile Complexes During Copper Film Growth by the Combined Synthesis-Transport Method Full article
Journal |
Inorganic Materials
ISSN: 0020-1685 , E-ISSN: 1608-3172 |
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Output data | Year: 2013, Volume: 49, Number: 8, Pages: 775-780 Pages count : 6 DOI: 10.1134/S0020168513080013 | ||||
Tags | Thin Copper Film; Volatile Precursor; Formic Acid Molecule; Carbonyl Hydride; Combine Synthesis | ||||
Authors |
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Affiliations |
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Funding (1)
1 | Russian Foundation for Basic Research | 12-03-01018 |
Abstract:
Stable heterogeneous synthesis products in combined synthesis-transport processes for the growth of thin copper films have been studied by ESR, X-ray photoelectron, and IR spectroscopies. The results demonstrate that the synthesized volatile compounds condensed on solid surfaces have the form of formate-like metal complexes of copper(I). We have identified the mechanisms underlying the formation of volatile monomeric metal complexes on the surface of copper-containing precursor particles and the mechanism of the thermal decomposition of metal complexes on a heated substrate.
Cite:
Badalyan A.M.
, Polyakov M.S.
, Kaichev V.V.
, NadolinnyI V.A.
, Igumenov I.K.
Formation of Small Volatile Complexes During Copper Film Growth by the Combined Synthesis-Transport Method
Inorganic Materials. 2013. V.49. N8. P.775-780. DOI: 10.1134/S0020168513080013 WOS Scopus РИНЦ
Formation of Small Volatile Complexes During Copper Film Growth by the Combined Synthesis-Transport Method
Inorganic Materials. 2013. V.49. N8. P.775-780. DOI: 10.1134/S0020168513080013 WOS Scopus РИНЦ
Original:
Бадалян А.
, Поляков М.
, Каичев В.В.
, Надолинный В.
, Игуменов И.
Образование “малоразмерных” летучих комплексов при осаждении пленок меди методом совмещенного синтеза-переноса
Неорганические материалы. 2013. Т.49. №8. С.833-838. DOI: 10.7868/S0002337X13080010 РИНЦ
Образование “малоразмерных” летучих комплексов при осаждении пленок меди методом совмещенного синтеза-переноса
Неорганические материалы. 2013. Т.49. №8. С.833-838. DOI: 10.7868/S0002337X13080010 РИНЦ
Dates:
Submitted: | Jul 12, 2012 |
Published online: | Jul 7, 2013 |
Published print: | Aug 1, 2013 |
Identifiers:
Web of science | WOS:000323064500007 |
Scopus | 2-s2.0-84879999207 |
Elibrary | 20442361 |
Chemical Abstracts | 2013:1062907 |
Chemical Abstracts (print) | 159:629082 |
OpenAlex | W2091667964 |