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Gritsenko V.
,
Gritsenko D.
,
Shaimeev S.
,
Aliev V.
,
Nasyrov K.
,
Erenburg S.
,
Tapilin V.
,
Wong H.
,
Poon M.C.
,
Lee J.H.
,
Lee J.-W.
,
Kim C.W.
Atomic and Electronic Structures of Amorphous ZrO2 and HfO 2 Films
Microelectronic Engineering. 2005.
V.81. N2-4. P.524-529. DOI: 10.1016/j.mee.2005.03.056
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