1
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Smirnova T.P.
,
Saraev A.A.
,
Korolkov I.V.
,
Kitchai V.N.
,
Borisov V.O.
The Crystal Structure of Solid Solutions Formed in the HfO2-Sc2O3 Nanoscale System
Journal of Crystal Growth. 2019.
V.523. 125156
:1-7. DOI: 10.1016/j.jcrysgro.2019.125156
publication_identifier_short.wos_identifier_type
publication_identifier_short.scopus_identifier_type
publication_identifier_short.rinz_identifier_type
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2
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Smirnova T.P.
,
Yakovkina L.V.
,
Borisov V.O.
,
Kichai V.N.
,
Kaichev V.V.
,
Saraev A.A.
Growth, Chemical Composition, and Structure of Thin LaxHf1-xOy films on Si
Inorganic Materials. 2014.
V.50. N2. P.158-164. DOI: 10.1134/S0020168514020162
publication_identifier_short.wos_identifier_type
publication_identifier_short.scopus_identifier_type
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3
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Yakovkina L.V.
,
Smirnova T.P.
,
Borisov V.O.
,
Kichai V.N.
,
Kaichev V.V.
Synthesis and Properties of Dielectric (HfO2)1 − x (Sc2O3) x Films
Inorganic Materials. 2013.
V.49. N2. P.172-178. DOI: 10.1134/S0020168513020234
publication_identifier_short.wos_identifier_type
publication_identifier_short.scopus_identifier_type
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4
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Smirnova T.P.
,
Yakovkina L.V.
,
Borisov V.O.
,
Kichai V.N.
,
Kaichev V.V.
,
Kriventsov V.V.
Structure of HfO2 Films and Binary Oxides on Its Base
Journal of Structural Chemistry. 2012.
V.53. N4. P.708-714. DOI: 10.1134/S0022476612040130
publication_identifier_short.wos_identifier_type
publication_identifier_short.scopus_identifier_type
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5
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Smirnova T.P.
,
Badalyan A.M.
,
Borisov V.O.
,
Bakhturova L.F.
,
Kaichev V.V.
,
Podgorbunskaya T.A.
,
Rakhlin V.I.
Plasma-Chemical Deposition of SiCN Films from Volatile N-Bromhexamethyldisilazane
Inorganic Materials. 2008.
V.44. N12. P.1312-1318. DOI: 10.1134/S0020168508120091
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publication_identifier_short.scopus_identifier_type
publication_identifier_short.rinz_identifier_type
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6
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Smirnova T.P.
,
Badalyan A.M.
,
Borisov V.O.
,
Kaichev V.V.
,
Bakhturova L.F.
,
Kichai V.N.
,
Rakhlin V.I.
,
Shainyan B.A.
Plasma Deposition and Properties of Silicon Carbonitride Films
Inorganic Materials. 2005.
V.41. N7. P.706-712. DOI: 10.1007/s10789-005-0195-9
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publication_identifier_short.scopus_identifier_type
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7
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Smirnova T.P.
,
Badalyan A.M.
,
Borisov V.O.
,
Yakovkina L.V.
,
Kaichev V.V.
,
Shmakov A.N.
,
Nartova A.V.
,
Rakhlin V.I.
,
Fomina A.N.
Microstructure and Chemical Bonding in Silicon Carbonitride Films Synthesized by Plasma Enhanced Chemical Vapor Deposition
Journal of Structural Chemistry. 2003.
V.44. N1. P.169-173. DOI: 10.1023/A:1024953518950
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publication_identifier_short.scopus_identifier_type
publication_identifier_short.rinz_identifier_type
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8
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Smirnova T.P.
,
Badalyan A.M.
,
Borisov V.O.
,
Yakovkina L.V.
,
Kaichev V.V.
,
Shmakov A.N.
,
Nartova A.V.
,
Rakhlin V.I.
,
Fomina A.N.
Plasma-Enhanced Chemical Vapor Deposition of Silicon Carbonitride Films from Volatile Silyl Derivatives of 1,1-Dimethylhydrazine
High Energy Chemistry. 2003.
V.37. N5. P.303-309. DOI: 10.1023/A:1025700829352
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publication_identifier_short.scopus_identifier_type
publication_identifier_short.rinz_identifier_type
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9
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Smirnova T.P.
,
Badalyan A.M.
,
Yakovkina L.V.
,
Shmakov A.N.
,
Asanov I.P.
,
Borisov V.O.
Composition and Structure of Films Deposited from Silyl Derivatives of Asymmetrical Dimethylhydrazine
Inorganic Materials. 2003.
V.39. N2. P.117-122. DOI: 10.1023/A:1022186310997
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publication_identifier_short.scopus_identifier_type
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