Atomic and Electronic Structure of Ferroelectric La-Doped HfO2 Films Научная публикация
Журнал |
Materials Research Express
, E-ISSN: 2053-1591 |
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Вых. Данные | Год: 2019, Том: 6, Номер: 3, Номер статьи : 036403, Страниц : 7 DOI: 10.1088/2053-1591/aaf436 | ||||||||
Ключевые слова | hafnium oxide, photoelectron spectra, HRTEM, specroellipsometry, DFT, oxygen vacancy, FRAM | ||||||||
Авторы |
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Организации |
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Информация о финансировании (2)
1 | Российский научный фонд | 14-22-00143 |
2 | Российский научный фонд | 14-19-00192 |
Реферат:
The atomic structure and optical properties of ferroelectric La-doped hafnium oxide (La:HfO2) thin films grown by the plasma-assisted atomic layer deposition were investigated. Using high resolution transmission electron microscopy, it was shown that the studied La:HfO2 film has a orthorhombic polar structure with the Pmn21 space group. It was found that the film exhibits ferroelectric properties. By means of x-ray photoelectron spectroscopy and specroellipsometry it was established that La:HfO2 consists of the HfO2 and La2O3 phases mixture. The specroellipsometry analysis with the Bruggeman effective medium approximation showed that the investigated La:HfO2 consists of 88% HfO2 and 12% La2O3. It is shown that etching La:HfO2 with argon ions leads to the oxygen vacancies generation in the near-surface region. These vacancies are generated mainly due to the knocking out of oxygen atoms to the interstitial positions, and the following annealing at 700 °C in vacuum for 1 h leads to the annihilation of that Frenkel defects.
Библиографическая ссылка:
Perevalov T.V.
, Gutakovskii A.K.
, Kruchinin V.N.
, Gritsenko V.A.
, Prosvirin I.P.
Atomic and Electronic Structure of Ferroelectric La-Doped HfO2 Films
Materials Research Express. 2019. V.6. N3. 036403 :1-7. DOI: 10.1088/2053-1591/aaf436 WOS Scopus РИНЦ
Atomic and Electronic Structure of Ferroelectric La-Doped HfO2 Films
Materials Research Express. 2019. V.6. N3. 036403 :1-7. DOI: 10.1088/2053-1591/aaf436 WOS Scopus РИНЦ
Даты:
Поступила в редакцию: | 14 нояб. 2018 г. |
Принята к публикации: | 27 нояб. 2018 г. |
Опубликована online: | 5 дек. 2018 г. |
Опубликована в печати: | 1 мар. 2019 г. |
Идентификаторы БД:
Web of science | WOS:000452701300003 |
Scopus | 2-s2.0-85059244428 |
РИНЦ | 38635371 |
Chemical Abstracts | 2019:836529 |
OpenAlex | W2902290026 |