Formation of SnO and SnO2 Phases During the Annealing of SnO(x) Films Obtained by Molecular Beam Epitaxy
Научная публикация
| Общая информация |
Язык:
Английский,
Жанр:
Статья (Full article),
Статус опубликования:
Опубликована,
Оригинальность:
Оригинальная
|
| Конференция |
3rd International Conference on Applied Surface Science
17-19 июн. 2019
,
Pisa
|
| Журнал |
Applied Surface Science
ISSN: 0169-4332
|
| Вых. Данные |
Год: 2020,
Том: 512,
Номер статьи
: 145735,
Страниц
: 7
DOI:
10.1016/j.apsusc.2020.145735
|
| Ключевые слова |
Absorption edge; Molecular-beam epitaxy; Morphology; Photoluminescence; Raman spectroscopy; Refractive index; Tin oxide; X-ray phase analysis; X-ray photoelectron spectroscopy |
| Авторы |
Nikiforov Alexander
1,2
,
Timofeev Vyacheslav
1
,
Mashanov Vladimir
1
,
Azarov Ivan
1,5
,
Loshkarev Ivan
1
,
Volodin Vladimir
1,5
,
Gulyaev Dmitry
1
,
Chetyrin Igor
3
,
Korolkov Ilya
4,5
|
| Организации |
| 1 |
A.V. Rzhanov Institute of Semiconductor Physics SB RAS, 13 Lavrentyev Avenue, Novosibirsk 630090, Russia
|
| 2 |
National Research Tomsk State University, 36 Lenin Avenue, Tomsk 634050, Russia
|
| 3 |
Boreskov Institute of Catalysis SB RAS, 5 Lavrentyev Avenue, Novosibirsk 630090, Russia
|
| 4 |
Nikolaev Institute of Inorganic Chemistry SB RAS, 3 Lavrentyev Avenue, Novosibirsk 630090, Russia
|
| 5 |
Novosibirsk State University, 1 Pirogov str., Novosibirsk 630090, Russia
|
|
Информация о финансировании (4)
|
1
|
Российский фонд фундаментальных исследований
|
18-32-20064 (АААА-А19-119090490028-1)
|
|
2
|
Российский фонд фундаментальных исследований
|
18-42-540018
|
|
3
|
Российский фонд фундаментальных исследований
|
18-52-41006 (АААА-А18-118060490033-9)
|
|
4
|
Министерство науки и высшего образования Российской Федерации
|
0306-2019-0019
|
SnO and SnO2 films were obtained on the SiO2 surface by the molecular-beam epitaxy method. The initial films are in the polycrystalline phase. The annealing of SnO(x) films at a temperature of 300 °C resulted in the formation of the tetragonal SnO phase. Three vibration modes Eg, A1g, and B1g with the frequencies of Sn[sbnd]O bond vibrations of 113, 211 and ~360 cm−1, respectively, which correspond to the SnO phase, were first observed by the Raman spectroscopy method. The orthorhombic SnO2 films were obtained by increasing the annealing temperature to 500 °C. Based on the valence band XPS (X-ray photoelectron spectroscopy) spectrum, several features with the binding energy approximately 5 eV, 7.5 eV and 11 eV, which are the same with the valence band of SnO2, were identified. The refractive index and absorption coefficient were investigated by the spectral ellipsometry technique. The high absorption coefficients correspond to the high Sn content. The film dielectric properties were revealed at the temperature higher than 300 °C. The refractive index values lie in the range of 1.5–2.6 for the visible spectral region. The pronounced absorption edges at 2.85 eV and 3.6 eV corresponding to those of stannous oxide (SnO) and stannic oxide (SnO2) were observed. The photoluminescence (PL) from the SnO(x) films was observed at room temperature. The increase of the annealing temperature resulted in the increase of PL intensity. Such PL intensity behavior is likely due to the Sn nanoislands. © 2020 Elsevier B.V.