Removal of CF4 from NF3 at the Phase Interface
Статья (Full article),
Journal of the Taiwan Institute of Chemical Engineers
||Close boiling points; Industrial application; Nitrogen trifluoride; Phase boundary; Purification; Separation method
Boreskov Institute of Catalysis, Akademik Lavrentiev Ave 5, Novosibirsk 630090, Russia
Institute of Automation and Electrometry, Akademik Koptyug Ave 1, Novosibirsk 630090, Russia
Информация о финансировании (1)
Министерство науки и высшего образования Российской Федерации
Background The close boiling points of carbon tetrafluoride (CF4) and nitrogen trifluoride (NF3) and the chemical inertness of CF4 make it difficult to remove it from NF3.
Methods A method for cleaning NF3 from CF4 at the gas-liquid interface is proposed. The purification is carried out by a sequence of cycles: (1) fractional condensation of NF3 at a cryostat temperature (TCry), at which the equilibrium pressure of CF4 exceeds its partial pressure in the feed mixture; and (2) pumping out the gas phase enriched with CF4 and high-boiling impurities. The cycles are repeated at a next TCry corresponding to the new CF4 content, and are completed by cryogenic distillation of the condensate with the removal of low-boiling impurities.
Findings The CF4 content of 5000 ppm in a 25 g NF3 sample was reduced to less than 100 ppm in three cycles at TCry = 120 K; a CF4 separation coefficient above 40 was achieved. The method can be used for the industrial production of high-purity NF3, with the cryostat refrigerant being the only consumable material, as well as for the separation of other substances with close boiling points, such as isomers or isotopes. © 2021 Taiwan Institute of Chemical Engineers