XPS and Cathodoluminescence Studies of HfO2, Sc2O3 and (HfO2)1-x(Sc2O3)x Films Научная публикация
Журнал |
The European Physical Journal - Applied Physics
ISSN: 1286-0042 , E-ISSN: 1286-0050 |
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Вых. Данные | Год: 2013, Том: 64, Номер: 1, Страницы: 10302-1-4 Страниц : 4 DOI: 10.1051/epjap/2013130005 | ||||||||
Ключевые слова | RAY PHOTOELECTRON-SPECTROSCOPY; ULTRAVIOLET PHOTONS; (HFO2)(X)(Al2O3)(1-X); INTERFACE; PHOTOLUMINESCENCE; PHOTOEMISSION; DEPOSITION; (100)Si; HAFNIUM; SILICON | ||||||||
Авторы |
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Организации |
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Информация о финансировании (3)
1 | Сибирское отделение Российской академии наук | 9 |
2 | Российский фонд фундаментальных исследований | 12-03-00131 |
3 | Президиум РАН | 18 |
Реферат:
X-ray photoelectron spectroscopy (XPS) and cathodoluminescence (CL) method have been employed to study the chemical composition and the oxygen vacancy concentration of HfO2, Sc2 O3 and (HfO2)1−x(Sc2O3)x films. It was found that the increase of Sc content led to monotonic decreasing the Hf4f7/2 and Sc2p3/2 binding energies indicating to form solid solution (HfO2)1−x(Sc2O3)x. All the samples characterized by the intensive CL spectra with maximum around 3 eV which originated due to some radiative recombination emission caused by oxygen deficiency. The concentration of oxygen vacancy in the Sc-doped HfO2 is sensitive to the Sc content and as a result the intensity of CL spectra of (HfO2)1−x(Sc2O3)x is lower that those of pure HfO2 and Sc2O3.
Библиографическая ссылка:
Kaichev V.V.
, Ivanova E.V.
, Zamoryanskaya M.V.
, Smirnova T.P.
, Yakovkina L.V.
, Gritsenko V.A.
XPS and Cathodoluminescence Studies of HfO2, Sc2O3 and (HfO2)1-x(Sc2O3)x Films
The European Physical Journal - Applied Physics. 2013. V.64. N1. P.10302-1-4. DOI: 10.1051/epjap/2013130005 WOS Scopus РИНЦ
XPS and Cathodoluminescence Studies of HfO2, Sc2O3 and (HfO2)1-x(Sc2O3)x Films
The European Physical Journal - Applied Physics. 2013. V.64. N1. P.10302-1-4. DOI: 10.1051/epjap/2013130005 WOS Scopus РИНЦ
Даты:
Поступила в редакцию: | 27 дек. 2012 г. |
Принята к публикации: | 5 сент. 2013 г. |
Опубликована в печати: | 1 окт. 2013 г. |
Опубликована online: | 25 окт. 2013 г. |
Идентификаторы БД:
Web of science | WOS:000332937100002 |
Scopus | 2-s2.0-84973397986 |
РИНЦ | 27567418 |
Chemical Abstracts | 2013:1828504 |
Chemical Abstracts (print) | 160:700552 |
OpenAlex | W2058707136 |