FT-IR Investigation of Netlike Polymerization of SU-8 Resist Layers During Photo- and X-ray Lithography Processes Доклады на конференциях
Язык | Английский | ||
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Тип доклада | Стендовый | ||
Конференция |
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 13-17 июл. 2020 , Novosibirsk |
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Организации |
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Библиографическая ссылка:
Reznikova E.F.
, Nazmov V.P.
, Neustroeva A.A.
FT-IR Investigation of Netlike Polymerization of SU-8 Resist Layers During Photo- and X-ray Lithography Processes
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 13-17 Jul 2020
FT-IR Investigation of Netlike Polymerization of SU-8 Resist Layers During Photo- and X-ray Lithography Processes
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 13-17 Jul 2020