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1
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Plekhanov A.G.
,
Maksimovskiy E.A.
,
Kriventsov V.V.
,
Korolkov I.V.
,
Saraev A.A.
,
Lavrov A.N.
,
Grebenkina M.A.
,
Kolodin A.N.
,
Trunova V.A.
Composition, Structure, and Magnetic Properties of SiCxNyFez Films Produced by the PECVD Method from a Gas Mixture of 1,1,1,3,3,3-Hexamethyldisilazane, Ferrocene, and Helium
Colloids and Surfaces A: Physicochemical and Engineering Aspects. 2022.
V.655. 130333
:1-10. DOI: 10.1016/j.colsurfa.2022.130333
WOS
Scopus
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