X-Ray Film Interferometer as an Instrument for Semiconductor Heterostructure Investigation Full article
Conference |
13th National Synchrotron Radiation Conference 17-21 Jul 2000 , Новосибирск |
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Journal |
Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002 |
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Output data | Year: 2001, Volume: 470, Number: 1-2, Pages: 110-113 Pages count : 4 DOI: 10.1016/S0168-9002(01)01008-7 | ||||
Tags | Epitaxial heterosystem, Interferometer, Synchrotron radiation | ||||
Authors |
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Affiliations |
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Funding (3)
1 | Russian Foundation for Basic Research | 00-02-17485 |
2 | Russian Foundation for Basic Research | 00-02-17900 |
3 | Russian Foundation for Basic Research | 00-02-17994 |
Abstract:
Translation Moiré pictures were first observed in interference topographs obtained using Synchrotron radiation. A film interferometer was prepared on the base of the GeSi heterosystem. Another film interferometer, which presents the heterosystem of epitaxial Si/ porous Si/ substrate Si, permitted us to observe a decrease in the bending of the film atomic planes at annealing of the heterosystem. This bend smoothing was calculated with the sensitivity better than 1 Å with the use of X-ray interference topographs. Contrast peculiarities in Moiré pictures are discussed for nondiffracting layers and crystal quantum wells.
Cite:
Vasilenko A.P.
, Kolesnikov A.V.
, Nikitenko S.G.
, Fedorov A.A.
, Sokolov L.V.
, Nikiforov A.I.
, Trukhanov E.M.
X-Ray Film Interferometer as an Instrument for Semiconductor Heterostructure Investigation
Nuclear Instruments and Methods in Physics Research Section A. 2001. V.470. N1-2. P.110-113. DOI: 10.1016/S0168-9002(01)01008-7 WOS Scopus РИНЦ
X-Ray Film Interferometer as an Instrument for Semiconductor Heterostructure Investigation
Nuclear Instruments and Methods in Physics Research Section A. 2001. V.470. N1-2. P.110-113. DOI: 10.1016/S0168-9002(01)01008-7 WOS Scopus РИНЦ
Dates:
Published online: | Aug 28, 2001 |
Published print: | Sep 1, 2001 |
Identifiers:
Web of science | WOS:000170979000023 |
Scopus | 2-s2.0-0035450081 |
Elibrary | 13375925 |
Chemical Abstracts | 2001:653474 |
Chemical Abstracts (print) | 135:364969 |
OpenAlex | W2031292731 |