Fabrication and Preliminary Testing of Regular Microporous Membranes Manufactured by Deep X-ray Lithography at the VEPP-3 Storage Rring Full article
Conference |
10th National Synchrotron Radiation Conference 11-15 Jul 1994 , Новосибирск |
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Journal |
Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002 |
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Output data | Year: 1995, Volume: 359, Number: 1-2, Pages: 404-408 Pages count : 5 DOI: 10.1016/0168-9002(94)01743-3 | ||||||||
Authors |
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Affiliations |
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Abstract:
Regular microporous membranes with pores of 0.3–0.5 μm in diameter arranged in a rectangular grid with 1 μm spacing have been made on the basis of 2.5, 3, 6 and 10 μm thick mylar films by deep X-ray lithography at the VEPP-3 storage ring. The membranes have a geometrical transparency of 10–20% and this value can be increased up to 50% and higher by using an X-ray mask with an appropriate pattern. The results of preliminary membrane testing by scanning electron microscopy and by gas conductance measurements are presented. In contrast to the traditional track membranes with random pore locations, the regular membranes have no dispersion of pore sizes caused by confluence of adjoining pores. Some possible applications of the membranes are discussed.
Cite:
Kulipanov G.N.
, Makarov O.A.
, Mezentseva L.A.
, Mishnev S.I.
, Naz'mov V.P.
, Pindyurin V.F.
, Redin O.A.
, Skrinsky A.N.
, Artamonova L.D.
, Cherkov G.A.
, Deis G.A.
, Gashtold V.N.
, Prokopenko V.S.
, Chesnokov V.V.
, Reznikova E.F.
Fabrication and Preliminary Testing of Regular Microporous Membranes Manufactured by Deep X-ray Lithography at the VEPP-3 Storage Rring
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.404-408. DOI: 10.1016/0168-9002(94)01743-3 WOS Scopus РИНЦ
Fabrication and Preliminary Testing of Regular Microporous Membranes Manufactured by Deep X-ray Lithography at the VEPP-3 Storage Rring
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.404-408. DOI: 10.1016/0168-9002(94)01743-3 WOS Scopus РИНЦ
Dates:
Published print: | May 1, 1995 |
Published online: | Feb 23, 2000 |
Identifiers:
Web of science | WOS:A1995QY84500104 |
Scopus | 2-s2.0-0010237652 |
Elibrary | 30814700 |
Chemical Abstracts | 1995:539531 |
Chemical Abstracts (print) | 123:146017 |
OpenAlex | W2037060866 |