Purity of Sputtered Iron and Platinum Film Surfaces ArticleGenre_short.SHORT_COMMUNICATION
Journal |
Kinetics and Catalysis
ISSN: 0023-1584 , E-ISSN: 1608-3210 |
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Output data | Year: 1975, Volume: 16, Number: 2, Pages: 472-474 Pages count : 3 | ||
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Abstract:
The surfaces of Fe or Pt films prepared by sputtering in high vacuum are significantly more pure (Auger-spectroscopy pure) than those of foils or wires heated in a high vacuum to the max. high temp. and alternately oxidized and reduced. The films were sputtered on a W substrate (purified at 2300°K in high vacuum) till the W surface was completely covered by Fe or Pt. The impurities (S or P) are concd. in the sputtered film at the initial stage of sputtering. They were removed from the substrate on heating in high vacuum at 2000°K. The subsequent sputtering produced more pure films. The expts. suggest that the Auger spectroscopy can be used successfully for the surface diffusion study of a metal on a substrate.
Cite:
Dadayan K.A.
, Savchenko V.I.
Purity of Sputtered Iron and Platinum Film Surfaces
Kinetics and Catalysis. 1975. V.16. N2. P.472-474. WOS РИНЦ
Purity of Sputtered Iron and Platinum Film Surfaces
Kinetics and Catalysis. 1975. V.16. N2. P.472-474. WOS РИНЦ
Original:
Дадаян К.А.
, Савченко В.И.
О чистоте поверхности напыленных пленок железа и платины
Кинетика и катализ. 1975. Т.16. №2. С.548-551. РИНЦ
О чистоте поверхности напыленных пленок железа и платины
Кинетика и катализ. 1975. Т.16. №2. С.548-551. РИНЦ
Dates:
Submitted: | Jun 11, 1973 |
Identifiers:
Web of science | WOS:A1975BC91100030 |
Elibrary | 30610365 |
Citing:
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