Fabrication and Preliminary Testing of Regular Microporous Membranes Manufactured by Deep X-ray Lithography at the VEPP-3 Storage Rring | Sciact - CRIS-system of Boreskov Institute of Catalysis

Fabrication and Preliminary Testing of Regular Microporous Membranes Manufactured by Deep X-ray Lithography at the VEPP-3 Storage Rring Full article

Conference

10th National Synchrotron Radiation Conference
11-15 Jul 1994 , Новосибирск

Journal

Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002

Output data

Year: 1995, Volume: 359, Number: 1-2, Pages: 404-408 Pages count : 5 DOI: 10.1016/0168-9002(94)01743-3

Authors

Kulipanov G.N. ¹ , Makarov O.A. ¹ , Mezentseva L.A. ¹ , Mishnev S.I. ¹ , Naz'mov V.P. ¹ , Pindyurin V.F. ¹ , Redin O.A. ¹ , Skrinsky A.N. ¹ , Artamonova L.D. ² , Cherkov G.A. ² , Deis G.A. ² , Gashtold V.N. ² , Prokopenko V.S. ² , Chesnokov V.V. ³ , Reznikova E.F. ⁴

Affiliations

1	Budker Institute for Nuclear Physics
2	VOSTOK Company
3	Institute of Engineers of Geodesy, Aerophotographic Sewing and Cartography
4	Institute of Inorganic Chemistry

Regular microporous membranes with pores of 0.3–0.5 μm in diameter arranged in a rectangular grid with 1 μm spacing have been made on the basis of 2.5, 3, 6 and 10 μm thick mylar films by deep X-ray lithography at the VEPP-3 storage ring. The membranes have a geometrical transparency of 10–20% and this value can be increased up to 50% and higher by using an X-ray mask with an appropriate pattern. The results of preliminary membrane testing by scanning electron microscopy and by gas conductance measurements are presented. In contrast to the traditional track membranes with random pore locations, the regular membranes have no dispersion of pore sizes caused by confluence of adjoining pores. Some possible applications of the membranes are discussed.

Kulipanov G.N. , Makarov O.A. , Mezentseva L.A. , Mishnev S.I. , Naz'mov V.P. , Pindyurin V.F. , Redin O.A. , Skrinsky A.N. , Artamonova L.D. , Cherkov G.A. , Deis G.A. , Gashtold V.N. , Prokopenko V.S. , Chesnokov V.V. , Reznikova E.F.
Fabrication and Preliminary Testing of Regular Microporous Membranes Manufactured by Deep X-ray Lithography at the VEPP-3 Storage Rring
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.404-408. DOI: 10.1016/0168-9002(94)01743-3 WOS Scopus РИНЦ ANCAN OpenAlex

Published print:	May 1, 1995
Published online:	Feb 23, 2000

Web of science:	WOS:A1995QY84500104
Scopus:	2-s2.0-0010237652
Elibrary:	30814700
Chemical Abstracts:	1995:539531
Chemical Abstracts (print):	123:146017
OpenAlex:	W2037060866

DB	Citing
Web of science	5
Scopus	6
OpenAlex	5