Structural Features and Surface Composition of Epitaxial α-FeSi2 Films Obtained by CVD | Sciact - CRIS-система Института катализа

Structural Features and Surface Composition of Epitaxial α-FeSi2 Films Obtained by CVD Научная публикация

Журнал

Materials and Design
ISSN: 0264-1275 , E-ISSN: 1873-4197

Вых. Данные

Год: 2018, Том: 137, Страницы: 422-429 Страниц : 8 DOI: 10.1016/j.matdes.2017.10.030

Ключевые слова

Epitaxial growth, Self-assembled structures, Surface composition, α-FeSi2

Авторы

Pushkarev R.V. ¹ , Fainer N.I. ¹ , Katsui H. ² , Kaichev V.V. ³ , Goto T. ²

Организации

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Novosibirsk, pr. Acad. Lavrent'ev, 3, 630090, Russia
2	Institute for Materials Research, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai 980-8577, Japan
3	Boreskov Institute of Catalysis, Siberian Branch of Russian Academy of Sciences, Novosibirsk, pr. Acad. Lavrent'ev, 5, 630090, Russia

Iron disilicide (α-FeSi2) is one of the promising materials for building ohmic contacts over silicon substrates. Complex approaches have been used to synthesize this material resulting in the insufficient control of the film surface and interface structure. The morphology of the α-FeSi2 films synthesized in this work by one-step CVD technique from ferrocene varies from the highly-oriented self-assembled crystallites to the dense film of α-FeSi2. The orientation of the material could be changed from α-FeSi2(001)||Si(100) to α-FeSi2(111)||Si(100) by raising the deposition temperature from 900 to 1000 °C. The epitaxial relationships FeSi2(001)||Si(100), α-FeSi2(010)||Si(001), and α-FeSi2(111)||Si(100), α-FeSi2(11¯0)||Si(011) were determined for both orientations by a pole figure technique. It was found the surface of the material has an iron oxide admixture. Both the surface and interface structure might have a great impact on the properties of the α-FeSi2/Si structures.

Pushkarev R.V. , Fainer N.I. , Katsui H. , Kaichev V.V. , Goto T.
Structural Features and Surface Composition of Epitaxial α-FeSi2 Films Obtained by CVD
Materials and Design. 2018. V.137. P.422-429. DOI: 10.1016/j.matdes.2017.10.030 WOS Scopus РИНЦ CAPlus OpenAlex

Поступила в редакцию:	27 июн. 2017 г.
Принята к публикации:	10 окт. 2017 г.
Опубликована online:	12 окт. 2017 г.
Опубликована в печати:	1 янв. 2018 г.

Web of science:	WOS:000414669500042
Scopus:	2-s2.0-85031900676
РИНЦ:	43200137
Chemical Abstracts:	2017:1710911
OpenAlex:	W2763274987

БД	Цитирований
Web of science	10
Scopus	11
РИНЦ	13
OpenAlex	11