Features of the MOCVD Formation of MgO−RuO2 Electron-Emitting Film Structures Full article
| Journal |
Journal of Structural Chemistry
ISSN: 0022-4766 , E-ISSN: 1573-8779 |
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| Output data | Year: 2019, Volume: 60, Number: 8, Pages: 1352-1360 Pages count : 9 DOI: 10.1134/S002247661908016X | ||||
| Tags | metal-organic chemical vapor deposition; magnesium oxide; ruthenium oxide; film nanostructures; secondary electron; emission coefficient | ||||
| Authors |
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| Affiliations |
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Funding (1)
| 1 | Russian Foundation for Basic Research | 18-08-01105 (АААА-А18-118013190035-2) |
Abstract:
Thin-film structures based on magnesium and ruthenium oxides are obtained by metal-organic chemical vapor deposition (MOCVD) on flat silicon substrates from volatile bis-(dipivaloylmethanato)(N, N, N’,N’-tetramethylethylenediamine)magnesium(II) and tris-(acetylacetonato)ruthenium(III) complexes in the presence of oxygen. The samples are studied by SEM, EDS, powder XRD, and differential dissolution; their emission characteristics are also measured. The features of the phase formation and the microstructure in the films formed are shown and different forms of magnesium and ruthenium oxides, including nonstoichiometric ones, are found. The MOCVD experimental parameters to form composite structures with high coefficients of electron-induced secondary electron emission (up to 7.2) are determined. These materials can be used as efficient emitting coatings in modern 3D electron multipliers.
Cite:
Vikulova E.S.
, Pochtar A.A.
, Morozova N.B.
, Vasilyeva I.G.
Features of the MOCVD Formation of MgO−RuO2 Electron-Emitting Film Structures
Journal of Structural Chemistry. 2019. V.60. N8. P.1352-1360. DOI: 10.1134/S002247661908016X WOS Scopus РИНЦ OpenAlex AN
Features of the MOCVD Formation of MgO−RuO2 Electron-Emitting Film Structures
Journal of Structural Chemistry. 2019. V.60. N8. P.1352-1360. DOI: 10.1134/S002247661908016X WOS Scopus РИНЦ OpenAlex AN
Original:
Викулова Е.С.
, Почтарь А.А.
, Морозова Н.Б.
, Васильева И.Г.
Особенности формирования эмиссионных пленочных структур MgO-RuO2 методом MOCVD
Журнал структурной химии. 2019. Т.60. №8. С.1404-1412. DOI: 10.26902/JSC_id44210 РИНЦ OpenAlex RSCI
Особенности формирования эмиссионных пленочных структур MgO-RuO2 методом MOCVD
Журнал структурной химии. 2019. Т.60. №8. С.1404-1412. DOI: 10.26902/JSC_id44210 РИНЦ OpenAlex RSCI
Dates:
| Submitted: | Mar 22, 2019 |
| Accepted: | Apr 8, 2019 |
| Published print: | Aug 1, 2019 |
| Published online: | Sep 4, 2019 |
Identifiers:
| ≡ Web of science: | WOS:000486152800016 |
| ≡ Scopus: | 2-s2.0-85071913180 |
| ≡ Elibrary: | 41690994 |
| ≡ OpenAlex: | W2971717162 |
| ≡ Chemical Abstracts: | 2019:1714437 |