Synthesis of Magnetic Nanocomposite Films SiCxNyFez by Plasma-Enhanced Chemical Decomposition of a Gaseous Mixture of 1,1,1,3,3,3-hexamethyldisilazane, Ferrocene, and Helium Научная публикация
| Журнал |
Journal of Structural Chemistry
ISSN: 0022-4766 , E-ISSN: 1573-8779 |
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| Вых. Данные | Год: 2020, Том: 61, Номер: 12, Страницы: 1865-1875 Страниц : 11 DOI: 10.1134/S0022476620120045 | ||||
| Ключевые слова | 1,1,1,3,3,3-hexamethyldisilazane; ferrocene; magnetic properties of composite films SiCxNyFez; plasma-enhanced chemical vapor deposition of films | ||||
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Реферат:
Abstract: A novel method is developed for the preparation of magnetic composite films with a complex composition SiCxNyFez using radio frequency plasma-enhanced chemical vapor decomposition of a gaseous mixture of 1,1,1,3,3,3-hexamethyldisilazane [(CH3)3Si]2NH, ferrocene (C5H5)2Fe, and helium. The films of various compositions are deposited in the temperature region 373-873 K. The dependence of physicochemical and functional properties of SiCxNyFez films on the synthesis conditions is studied with a number of modern methods such as IR spectroscopy, Raman spectroscopy, EDS, XPS, powder XRD. The IR spectra exhibit the same system of bonds as that in silicon carbonitride films, while the Raman spectra contain modes D and G indicating a presence of an impurity disordered graphite phase. It is established by the Faraday method and by electron paramagnetic resonance (EPR) that SiCxNyFez films prepared at 573-873 K are magnetic. According to the XPS data, the SiCxNyFez films may contain α-Fe, FeSi, or β-FeSi2 phases with similar binding energies; as a result, the composition of these films is difficult to determine. © 2020, Pleiades Publishing, Ltd.
Библиографическая ссылка:
Fainer N.I.
, Plekhanov A.G.
, Pushkarev R.V.
, Shayapov V.R.
, Maksimovskiy E.A.
, Nadolinny V.A.
, Korotaev E.V.
, Kaichev V.V.
Synthesis of Magnetic Nanocomposite Films SiCxNyFez by Plasma-Enhanced Chemical Decomposition of a Gaseous Mixture of 1,1,1,3,3,3-hexamethyldisilazane, Ferrocene, and Helium
Journal of Structural Chemistry. 2020. V.61. N12. P.1865-1875. DOI: 10.1134/S0022476620120045 WOS Scopus РИНЦ CAPlus OpenAlex
Synthesis of Magnetic Nanocomposite Films SiCxNyFez by Plasma-Enhanced Chemical Decomposition of a Gaseous Mixture of 1,1,1,3,3,3-hexamethyldisilazane, Ferrocene, and Helium
Journal of Structural Chemistry. 2020. V.61. N12. P.1865-1875. DOI: 10.1134/S0022476620120045 WOS Scopus РИНЦ CAPlus OpenAlex
Оригинальная:
Файнер Н.И.
, Плеханов А.Г.
, Пушкарёв Р.В.
, Шаяпов В.Р.
, Максимовский Е.А.
, Надолинный В.А.
, Коротаев Е.В.
, Каичев В.В.
Синтез магнитных композитных пленок SiCxNyFez плазмохимическим разложением газовой смеси 1,1,1,3,3,3-гексаметилдисилазана, ферроцена и гелия
Журнал структурной химии. 2020. Т.61. №12. С.1971-1981. DOI: 10.26902/jsc_id65932 РИНЦ OpenAlex
Синтез магнитных композитных пленок SiCxNyFez плазмохимическим разложением газовой смеси 1,1,1,3,3,3-гексаметилдисилазана, ферроцена и гелия
Журнал структурной химии. 2020. Т.61. №12. С.1971-1981. DOI: 10.26902/jsc_id65932 РИНЦ OpenAlex
Даты:
| Поступила в редакцию: | 14 мая 2020 г. |
| Принята к публикации: | 16 июн. 2020 г. |
| Опубликована online: | 25 дек. 2020 г. |
| Опубликована в печати: | 25 дек. 2022 г. |
Идентификаторы БД:
| Web of science: | WOS:000602178800004 |
| Scopus: | 2-s2.0-85098067319 |
| РИНЦ: | 45060385 |
| Chemical Abstracts: | 2020:2696411 |
| OpenAlex: | W3115329394 |