Multifunctional X-ray Lithography Station at VEPP-3 Научная публикация
| Конференция |
The International Conference "Synchrotron and Free electron laser Radiation: generation and application" 04-07 июл. 2016 , Novosibirsk |
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| Журнал |
Physics Procedia
ISSN: 1875-3892 |
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| Вых. Данные | Год: 2016, Том: 84, Страницы: 205-212 Страниц : 8 DOI: 10.1016/j.phpro.2016.11.036 | ||
| Ключевые слова | central beamstop; deep X-ray lithography; X-ray Lithographer; X-ray mask | ||
| Авторы |
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| Организации |
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Реферат:
The multifunctional X-ray lithography “LIGA” station on beamline 0 at the VEPP-3 synchrotron source is part of the shared-use center “Siberian Synchrotron and Terahertz Radiation Center” (SSTRC) in Budker Institute of Nuclear Physics (BINP, Novosibirsk, Russia). The station is intended to exposure of resist layers on substrates of different shape and lateral dimensions of 1 to 10 cm. The development of process and re-equipment of the station goes forward, continuously. In this work we consider the current capabilities of the station; examples of microstructures fabricated are presented.
Библиографическая ссылка:
Goldenberg B.G.
, Lemzyakov A.G.
, Nazmov V.P.
, Pindyurin V.F.
Multifunctional X-ray Lithography Station at VEPP-3
Physics Procedia. 2016.
V.84. P.205-212. DOI: 10.1016/j.phpro.2016.11.036
WOS
Scopus
РИНЦ
CAPlus
OpenAlex
Multifunctional X-ray Lithography Station at VEPP-3
Physics Procedia. 2016.
V.84. P.205-212. DOI: 10.1016/j.phpro.2016.11.036
WOS
Scopus
РИНЦ
CAPlus
OpenAlex
Файлы:
Полный текст от издателя
Даты:
| Поступила в редакцию: | 12 дек. 2016 г. |
Идентификаторы БД:
| Web of science: | WOS:000392696400034 |
| Scopus: | 2-s2.0-85016306530 |
| РИНЦ: | 29811823 |
| Chemical Abstracts: | 2016:2089572 |
| OpenAlex: | W2564058439 |