Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography | Sciact - CRIS-система Института катализа

Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography Научная публикация

Журнал

Optoelectronics, Instrumentation and Data Processing
ISSN: 8756-6990 , E-ISSN: 1934-7944

Вых. Данные

Год: 2019, Том: 55, Номер: 2, Страницы: 115–125 Страниц : 11 DOI: 10.3103/S875669901902002X

Ключевые слова

deep X-ray lithography; LIGA technology; microstructures; quasi-optical filters; terahertz range

Авторы

Gentselev A.N. ¹ , Kuznetsov S.A. ^1,2,3 , Dultsev F.N. ^3,4 , Goldenberg B.G. ¹ , Zelinsky A.G. ⁵ , Kondratyev V.I. ¹ , Tanygina D.S. ^2,6

Организации

1	Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrentieva 11, Novosibirsk, 630090 Russia
2	Novosibirsk Department of Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, “Design and Technology Institute of Applied Microelectronics”, pr. Akademika Lavrentieva 2/1, Novosibirsk, 630090 Russia
3	Novosibirsk State University, ul. Pirogova 2, Novosibirsk, 630090 Russia
4	dRzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrentieva 13, Novosibirsk, 630090 Russia
5	Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, ul. Kutateladze 18, Novosibirsk, 630128 Russia
6	Far Eastern Federal University, ul. Sukhanova 8, Vladivostok, 690091 Russia

A method for fabricating high-pass terahertz quasi-optical filters in the form of thick (up to 1 mm in thickness) self-bearing copper microstructures of subwavelength topology is described. This method is based on forming a high-aspect-ratio mask of SU-8 resist on a silicon wafer via deep X-ray lithography through a tungsten X-ray mask followed by electroplating a copper layer through the resistive mask. An example of a 212-µm thick structure with a cutoff frequency of 0.42 THz having the geometry of hexagon-shaped through-holes arranged on a triangular lattice is considered. The results of broadband THz characterization and electromagnetic analysis of the structure fabricated are presented.

Gentselev A.N. , Kuznetsov S.A. , Dultsev F.N. , Goldenberg B.G. , Zelinsky A.G. , Kondratyev V.I. , Tanygina D.S.
Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography
Optoelectronics, Instrumentation and Data Processing. 2019. V.55. N2. P.115–125. DOI: 10.3103/S875669901902002X WOS Scopus РИНЦ OpenAlex

Генцелев А.Н. , Кузнецов С.А. , Дульцев Ф.Н. , Гольденберг Б.Г. , Зелинский А.Г. , Кондратьев В.И. , Таныгина Д.С.
Реализация терагерцовых фильтров высоких частот на основе цельнометаллических микроструктур с использованием глубокой рентгенолитографии
Автометрия. 2019. Т.55. №2. С.14-27. DOI: 10.15372/AUT20190202 РИНЦ OpenAlex

Поступила в редакцию:	22 окт. 2018 г.
Принята к публикации:	24 дек. 2018 г.
Опубликована в печати:	1 мар. 2019 г.
Опубликована online:	14 июн. 2019 г.

Web of science:	WOS:000471658400002
Scopus:	2-s2.0-85067345698
РИНЦ:	41643330
OpenAlex:	W2952023856

БД	Цитирований
Web of science	4
Scopus	6
OpenAlex	5