Fabrication of Quasi-Optical Selective Elements for the Terahertz Range in the Form of Pseudometallic Structures Via Deep X-ray Lithography | Sciact - CRIS-система Института катализа

Fabrication of Quasi-Optical Selective Elements for the Terahertz Range in the Form of Pseudometallic Structures Via Deep X-ray Lithography Научная публикация

Журнал

Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques
ISSN: 1027-4510 , E-ISSN: 1819-7094

Вых. Данные

Год: 2017, Том: 11, Номер: 4, Страницы: 710–720 Страниц : 11 DOI: 10.1134/S1027451017040073

Ключевые слова

deep X-ray lithography, synchrotron radiation, X-ray mask, laser microtreatment (cutting), pseudometallic structure, terahertz radiation, high-pass filter, planar lens

Авторы

Gentselev A.N. ¹ , Kuznetsov S.A. ^1,2,3 , Baev S.G. ⁴ , Goldenberg B.G. ¹ , Lonshakov E.A. ^2,4

Организации

1	Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences
2	Novosibirsk National Research State University
3	Design-and-Technology Institute of Applied Microelectronics, Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
4	Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences

A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented

Gentselev A.N. , Kuznetsov S.A. , Baev S.G. , Goldenberg B.G. , Lonshakov E.A.
Fabrication of Quasi-Optical Selective Elements for the Terahertz Range in the Form of Pseudometallic Structures Via Deep X-ray Lithography
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. 2017. V.11. N4. P.710–720. DOI: 10.1134/S1027451017040073 WOS Scopus РИНЦ CAPlusCA OpenAlex

Генцелев А.Н. , Кузнецов С.А. , Баев С.Г. , Гольденберг Б.Г. , Лоншаков Е.А.
Создание квазиоптических селективных элементов терагерцового диапазона в виде псевдометаллических структур посредством глубокой рентгеновской литографии
Поверхность. Рентгеновские, синхротронные и нейтронные исследования. 2017. №7. С.32-42. DOI: 10.7868/s0207352817070071 РИНЦ OpenAlex

Поступила в редакцию:	9 нояб. 2016 г.
Опубликована в печати:	1 июл. 2017 г.
Опубликована online:	24 авг. 2017 г.

Web of science:	WOS:000409172900005
Scopus:	2-s2.0-85028038211
РИНЦ:	31068001
Chemical Abstracts:	2017:1378264
Chemical Abstracts (print):	169:194756
OpenAlex:	W2747477277

БД	Цитирований
Web of science	2
Scopus	3
OpenAlex	2