Chemical Structure and Functional Properties of Amorphous Boron Carbonitride Films | Sciact - CRIS-система Института катализа

Chemical Structure and Functional Properties of Amorphous Boron Carbonitride Films Научная публикация

Журнал

Journal of Structural Chemistry
ISSN: 0022-4766 , E-ISSN: 1573-8779

Вых. Данные

Год: 2021, Том: 62, Номер: 8, Страницы: 1309-1324 Страниц : 16 DOI: 10.1134/S0022476621080187

Ключевые слова

boron carbonitride; magnetron sputtering; mechanical properties; optical properties; surface wettability; thin films

Авторы

Sulyaeva V.S. ¹ , Gatapova E.Ya. ² , Kozhevnikov A.K. ¹ , Rogilo D.I. ³ , Saraev A.A. ⁴ , Yushina I.V. ¹ , Khomyakov M.N. ⁵ , Shapovalova A.A. ¹ , Shayapov V.R. ¹ , Bhaskar N. ⁶ , Tu R. ⁷ , Kosinova M.L. ¹

Организации

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2	Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
3	Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
4	Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
5	Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
6	Indian Institute of Science, Bangalore, India
7	Wuhan University of Technology, Wuhan, China

Информация о финансировании (2)

1	Российский фонд фундаментальных исследований Department of Science and Technology	18-53-80016 (АААА-А18-118091290003-8) / DST/IMRCD/BRICS/PilotCall2/SCBCPCVD/2018
2	Министерство науки и высшего образования Российской Федерации (с 15 мая 2018)	FWUZ-2021-0006 (121031700314-5)

We report a comprehensive study of the effect of the chemical structure of boron carbonitride films on the variability of their functional characteristics. The BCxNy films are prepared on Si(100) and fused silica substrates by reactive magnetron sputtering of a B4C target in an argon/nitrogen mixture. The deposition rate, elemental composition, and types of chemical bonds in the films is studied depending on the nitrogen content in the gas mixture. Optical (refractive index, transmission coefficient, band gap) and mechanical (hardness, Young′s modulus, substrate adhesion) characteristics are investigated depending on the deposition parameters and the chemical structure of the films. Particular attention is paid to the surface properties of the BCxNy films (morphology, roughness, contact angle, and surface free energy). Stability of the BCxNy films upon storage in air is studied for the first time. The data obtained for the composition, structural characteristics, and some functional properties of the BCxNy films are compared with those reported in literature. © 2021, Pleiades Publishing, Ltd.

Sulyaeva V.S. , Gatapova E.Y. , Kozhevnikov A.K. , Rogilo D.I. , Saraev A.A. , Yushina I.V. , Khomyakov M.N. , Shapovalova A.A. , Shayapov V.R. , Bhaskar N. , Tu R. , Kosinova M.L.
Chemical Structure and Functional Properties of Amorphous Boron Carbonitride Films
Journal of Structural Chemistry. 2021. V.62. N8. P.1309-1324. DOI: 10.1134/S0022476621080187 WOS Scopus РИНЦ CAPlus OpenAlex

Суляева В.С. , Гатапова Е.Я. , Кожевников А.К. , Рогило Д.И. , Сараев А.А. , Юшина И.В. , Хомяков М.Н. , Шаповалова А.А. , Шаяпов В.Р. , Баскар Н. , Ту Р. , Косинова М.Л.
Химическое строение и функциональные свойства аморфных пленок карбонитрида бора
Журнал структурной химии. 2021. Т.62. №8. С.1396-1412. DOI: 10.26902/JSC_id78472 РИНЦ OpenAlex

Поступила в редакцию:	13 мар. 2021 г.
Принята к публикации:	20 апр. 2021 г.
Опубликована в печати:	1 авг. 2021 г.
Опубликована online:	17 сент. 2021 г.

Web of science:	WOS:000696847500018
Scopus:	2-s2.0-85115145500
РИНЦ:	47058371
Chemical Abstracts:	2021:2062176
OpenAlex:	W3198963247

БД	Цитирований
Scopus	5
Web of science	5
РИНЦ	5
OpenAlex	5