Removal of CF4 from NF3 at the Phase Interface Full article
Journal |
Journal of the Taiwan Institute of Chemical Engineers
ISSN: 1876-1070 |
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Output data | Year: 2022, Volume: 131, Article number : 104178, Pages count : 6 DOI: 10.1016/j.jtice.2021.104178 | ||||
Tags | Close boiling points; Industrial application; Nitrogen trifluoride; Phase boundary; Purification; Separation method | ||||
Authors |
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Affiliations |
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Funding (1)
1 | Ministry of Science and Higher Education of the Russian Federation | 0239-2021-0002 |
Abstract:
Background The close boiling points of carbon tetrafluoride (CF4) and nitrogen trifluoride (NF3) and the chemical inertness of CF4 make it difficult to remove it from NF3.
Methods A method for cleaning NF3 from CF4 at the gas-liquid interface is proposed. The purification is carried out by a sequence of cycles: (1) fractional condensation of NF3 at a cryostat temperature (TCry), at which the equilibrium pressure of CF4 exceeds its partial pressure in the feed mixture; and (2) pumping out the gas phase enriched with CF4 and high-boiling impurities. The cycles are repeated at a next TCry corresponding to the new CF4 content, and are completed by cryogenic distillation of the condensate with the removal of low-boiling impurities.
Findings The CF4 content of 5000 ppm in a 25 g NF3 sample was reduced to less than 100 ppm in three cycles at TCry = 120 K; a CF4 separation coefficient above 40 was achieved. The method can be used for the industrial production of high-purity NF3, with the cryostat refrigerant being the only consumable material, as well as for the separation of other substances with close boiling points, such as isomers or isotopes. © 2021 Taiwan Institute of Chemical Engineers
Cite:
Cholach A.
, Yakovin D.
Removal of CF4 from NF3 at the Phase Interface
Journal of the Taiwan Institute of Chemical Engineers. 2022. V.131. 104178 :1-6. DOI: 10.1016/j.jtice.2021.104178 WOS Scopus РИНЦ ANCAN OpenAlex
Removal of CF4 from NF3 at the Phase Interface
Journal of the Taiwan Institute of Chemical Engineers. 2022. V.131. 104178 :1-6. DOI: 10.1016/j.jtice.2021.104178 WOS Scopus РИНЦ ANCAN OpenAlex
Dates:
Submitted: | Jun 23, 2021 |
Accepted: | Dec 13, 2021 |
Published online: | Dec 30, 2021 |
Published print: | Feb 1, 2022 |
Identifiers:
Web of science: | WOS:000754232500008 |
Scopus: | 2-s2.0-85121986356 |
Elibrary: | 47551284 |
Chemical Abstracts: | 2022:17542 |
Chemical Abstracts (print): | 177:351802 |
OpenAlex: | W4200327893 |