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Structure, Mechanical and Tribological Properties of Ti-Doped and Cr-Doped a-C:H:SiOx Coatings Научная публикация

Журнал Vacuum
ISSN: 0042-207X
Вых. Данные Год: 2024, Том: 219, Номер статьи : 112706, Страниц : 13 DOI: 10.1016/j.vacuum.2023.112706
Ключевые слова a-C:H:SiOx coatings; Me-doped DLC; PACVD; Magnetron sputtering; Hardness; Wear resistance; Adhesive strength
Авторы Grenadyorov A.S. 1 , Solovyev А.А. 1 , Oskirko V.O. 1 , Oskomov K.V. 1 , Semenov V.A. 1 , Sypchenko V.S. 2 , Saraev A.A. 3
Организации
1 The Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055, Tomsk, Russia
2 National Research Tomsk Polytechnic University, 30, Lenin Ave., 634050, Tomsk, Russia
3 Federal Research Center Boreskov Institute of Catalysis, 5, Lavrentiev Ave, 630090, Novosibirsk, Russia

Информация о финансировании (2)

1 Министерство науки и высшего образования Российской Федерации (с 15 мая 2018) 0239-2021-0003
2 Министерство науки и высшего образования Российской Федерации (с 15 мая 2018) FWRM-2021-0006

Реферат: The work is devoted to the deposition of Ti- and Cr-doped a-C:H:SiOx coatings on WC-8Co substrates using plasma-assisted chemical vapor deposition and magnetron sputtering methods. The structure, surface morphology, mechanical and tribological properties of coatings are investigated depending on the Ti or Cr content. It is shown that only a small concentration of Ti or Cr in coatings improves their mechanical and tribological properties compared to undoped coatings. The addition of 0.8 at.% Ti to the a-C:H:SiOx coating reduces its wear rate by 3 times, and the addition of 3 at.% Cr to the a-C:H:SiOx coating reduces its friction coefficient by 30% and the wear rate by 10 times. According to VDI 3198 standard, the Ti- and Cr-doped a-C:H: SiOx coatings with a low concentration of metals have the adhesive strength quality HF1. At higher metal concentrations, the properties of the coatings deteriorate due to graphitization of the carbon structure.
Библиографическая ссылка: Grenadyorov A.S. , Solovyev А.А. , Oskirko V.O. , Oskomov K.V. , Semenov V.A. , Sypchenko V.S. , Saraev A.A.
Structure, Mechanical and Tribological Properties of Ti-Doped and Cr-Doped a-C:H:SiOx Coatings
Vacuum. 2024. V.219. 112706 :1-13. DOI: 10.1016/j.vacuum.2023.112706 WOS Scopus РИНЦ CAPlus OpenAlex
Даты:
Поступила в редакцию: 20 июн. 2023 г.
Принята к публикации: 15 окт. 2023 г.
Опубликована online: 20 окт. 2023 г.
Опубликована в печати: 1 янв. 2024 г.
Идентификаторы БД:
Web of science: WOS:001102028500001
Scopus: 2-s2.0-85174443693
РИНЦ: 65725155
Chemical Abstracts: 2023:2189808
OpenAlex: W4387817497
Цитирование в БД:
БД Цитирований
Scopus 1
Web of science 1
Альметрики: