Microstructural and Chemical Effects of the Argon Cluster Bombardment on a Single Crystal KGd(WO4)2 Surface | Sciact - CRIS-система Института катализа

Microstructural and Chemical Effects of the Argon Cluster Bombardment on a Single Crystal KGd(WO4)2 Surface Научная публикация

Журнал

Applied Physics A: Materials Science and Processing
ISSN: 0947-8396 , E-ISSN: 1432-0630

Вых. Данные

Год: 2024, Том: 130, Номер: 11, Номер статьи : 842, Страниц : DOI: 10.1007/s00339-024-07995-6

Ключевые слова

Gas cluster ion; KGd(WO4)2; Crystal surface; Depth profiling; HRTEM

Авторы

Korobeishchikov Nikolay G. ¹ , Nikolaev Ivan V. ¹ , Atuchin Victor V. ^2,3,4,5,6 , Gerasimov Evgeny Y. ⁷ , Tolstoguzov Alexander ^8,9,10 , Abudouwufu Tushagu ¹¹ , Fu Dejun ¹¹

Организации

1	Department of Applied Physics, Novosibirsk State University, Novosibirsk, 630090, Russia
2	R&D Center “Advanced Electronic Technologies”, Tomsk State University, Tomsk, 634034, Russia
3	Research and Development Department, Kemerovo State University, Kemerovo, 650000, Russia
4	Department of Industrial Machinery Design, Novosibirsk State Technical University, Novosibirsk, 630073, Russia
5	Laboratory of Optical Materials and Structures, Institute of Semiconductor Physics, Novosibirsk, 630090, Russia
6	Department of Life Sciences, Western Caspian University, Baku, 1001, Azerbaijan
7	Department of Catalysts Investigation, Boreskov Institute of Catalysis, Novosibirsk, 630090, Russia
8	Utkin Ryazan State Radio Engineering University, Ryazan, 390005, Russia
9	Centre for Physics and Technological Research, Universidade Nova de Lisboa, 2829-516, Caparica, Portugal
10	Zhuhai Tsinghua University Research Institute Innovation Center, Zhuhai, 519000, China
11	School of Physics and Technology, Wuhan University, Wuhan, 430072, China

Информация о финансировании (3)

1	Российский научный фонд	23-79-10061 (123091300012-6)
2	National Natural Science Foundation of China	12305328
3	National Natural Science Foundation of China	12375285

To elucidate the influence of gas cluster-induced impacts on the deep structure of disturbances in tungstate optical materials, experimental studies were carried out. The precision-polished surface of a KGd(WO4)2 (KGW) single crystal was processed by an argon cluster ion beam with the average cluster size of 1000 atom/cluster at the energy of 10 keV, which ensures minimal damage and high processing efficiency. By using high-resolution TEM and EDX techniques of the transversely cut lamellae, the alterations in both the structure and chemical composition at varying depths were explore. In a 15 nm thick subsurface layer of the initial specimen, a nonuniform depth distribution was found for the constituent atoms of KGW. The results showed that, after the cluster bombardment, the initial amorphous layer thickness resulting from precision chemical–mechanical polishing was decreased from 50 to 23 nm. The distribution nonuniformity of constituent KGW atoms decreases in the upper subsurface layer, while it increases at greater depths.

Korobeishchikov N.G. , Nikolaev I.V. , Atuchin V.V. , Gerasimov E.Y. , Tolstoguzov A. , Abudouwufu T. , Fu D.
Microstructural and Chemical Effects of the Argon Cluster Bombardment on a Single Crystal KGd(WO4)2 Surface
Applied Physics A: Materials Science and Processing. 2024. V.130. N11. 842 . DOI: 10.1007/s00339-024-07995-6 WOS Scopus OpenAlex

Поступила в редакцию:	16 авг. 2024 г.
Принята к публикации:	16 окт. 2024 г.
Опубликована online:	29 окт. 2024 г.

Web of science:	WOS:001345726600002
Scopus:	2-s2.0-85208238503
OpenAlex:	W4403894004

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