Abstract: Accurate measurements of quantum efficiency (QE) in the EUV and VUV ranges for modern CCD and CMOS detectors for laboratory and space applications is still limited due to the complexity of the necessary equipment, especially the source of monochromatic, calibrated and uniform EUV and VUV radiation. We have taken QE measurements of two modern radiation-hard custom devices based on different technologies (CCD272-64 and GSENSE400BSI-GP CMOS), that can be used in space applications. Both sensors were specially designed to improve VUV/UV and EUV sensitivity respectively. The CCD272-64 was developed by Teledyne e2v for the WUVS spectrograph of the World Space Observatory Ultraviolet (WSO-UV) space project. The operating spectral range of the CCD is 115-305 nm, the pixel design and output amplifies are optimized to provide low level signal operation with a noise level of 3e- RMS and a maximum signal of 50ke-. We have measured QE values of a CCD with specially designed antireflection coating optimized for best performance in the 174-305 nm spectral range in accordance with WUVS spectrograph characteristics. We compare the QE values taken for coated and uncoated CCD regions. The GSENSE400BSI-GP CMOS is an experimental device developed by Gpixel company to compare the effectiveness of different technological ways to improve the EUV sensitivity and radiation resistance to strong overillumination in the EUV spectral range. We have compared 4 versions of the CMOS sensor, each with specific post-processing of the back surface: large/small boron implantation and strong/weak annealing. The QE values were measured in 17-59 nm and 120-300 nm spectral ranges. The QE values of the sensors were measured at Budker Institute of Nuclear Physics, Russian Academy of Sciences. The measurements were carried out at the “Cosmos” beamline using synchrotron radiation from the VEPP-4М synchrotron storage ring. An absolutely calibrated photodiode SPD was used for reference.

Cite: Shugarov A.S. , Vishnyakov E. , Nikolenko A.D. , Ivlyushkin D.V. , Zavertkin P.S. , Kirichenko A.S. , Kuzin S.V. , Pertsov A.A.
CCD and CMOS Quantum Efficiency Evaluation in the EUV and VUV Spectral Ranges
5-th Worksop for the Ultraviolet astronomy 27-29 Oct 2020