Manufacturing of High Resolution X-ray Masks for LIGA Technology in SSTRC - Доклады на конференциях | Sciact - CRIS-система Института катализа

Manufacturing of High Resolution X-ray Masks for LIGA Technology in SSTRC Доклады на конференциях

Язык

Английский

Тип доклада

Устный

Url доклада

https://indico.inp.nsk.su/event/3/contributions/1218/

Конференция

The International Conference "Synchrotron and Free electron laser Radiation: generation and application"
04-07 июл. 2016 , Novosibirsk

Авторы

Лемзяков Алексей Георгиевич ¹ , Генцелев Александр Николаевич ¹ , Гольденберг Борис Григорьевич ¹ , Назьмов Владимир Петрович ¹

Организации

1	Институт ядерной физики имени Г.И. Будкера СО РАН

One of main problems in deep X-ray lithography (DXRL) is X-ray masks fabrication. The primary way to get high-resolution X-ray masks is to use soft X-ray lithography with intermediate X-ray mask. The soft X-ray lithography is performed at “LIGA” station of VEPP-3 synchrotron radiation (SR) source in Siberian Synchrotron and Terahertz Radiation Centre (SSTRC). In addition, the technique of fabrication of intermediate X-ray mask based on titanium membrane is developed.

Lemzyakov A.A. , Gentselev A.N. , Goldenberg B.G. , Nazmov V.P.
Manufacturing of High Resolution X-ray Masks for LIGA Technology in SSTRC
The International Conference "Synchrotron and Free electron laser Radiation: generation and application" 04-07 Jul 2016