PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography - Доклады на конференциях | Sciact - CRIS-система Института катализа

PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography Доклады на конференциях

Язык

Английский

Тип доклада

Стендовый

Конференция

International Conference "Synchrotron and Free electron laser Radiation: generation and application"
27-30 июн. 2022 , Novosibirsk

Авторы

Назьмов Владимир Петрович ^1,2 , Варанд Александр ¹ , Михайленко Михаил Александрович ² , Гольденберг Борис Григорьевич ^1,3 , Просанов Игорь Юрьевич ² , Герасимов Константин Борисович ² , Любас Глеб Александрович ²

Организации

1	Институт ядерной физики имени Г.И. Будкера СО РАН
2	Институт химии твердого тела и механохимии СО РАН
3	Центр коллективного пользования "Сибирский кольцевой источник фотонов"

In the present work, we studied polymethyl methacrylate, with a molecular weight of ten million grams per mole achieved by ionic polymerization, which differs from its widely used analogue by an approximately tenfold increase in the length of the polymer chain. Based on the obtained absorption spectra in the IR range, data from differential thermal analysis and gel permeation chromatography, the changes caused by the ionizing radiation are studied. During thermal decomposition of the initial polymer, the mass loss dependence can be divided into different sections: low-temperature with a maximum decomposition rate at 260.5-261 °C and a process start point at 207-209 °C and a high-temperature one with a maximum decomposition rate at 379-379 °C with a process start point at 346-348 °C and the end of the process at 398-400 °C.

Nazmov V.P. , Varand A. , Mikhailenko M.A. , Goldenberg B.G. , Prosanov I.Y. , Gerasimov K.B. , Lubas G.
PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 27-30 Jun 2022