Investigation of Superlattice Period Inhomogeneity Using Quantitative Synchrotron Diffraction Topography Научная публикация
Конференция |
10th National Synchrotron Radiation Conference 11-15 июл. 1994 , Новосибирск |
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Журнал |
Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002 |
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Вых. Данные | Год: 1995, Том: 359, Номер: 1-2, Страницы: 178-180 Страниц : 3 DOI: 10.1016/0168-9002(94)01656-9 | ||||
Авторы |
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Организации |
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Информация о финансировании (1)
1 | Министерство образования и науки Российской Федерации | 3-007/2 |
Реферат:
The development of a novel and simple method for the measurement of the structure parameter inhomogeneity of semiconductor superlattices using X-ray and synchrotron topography is presented. The qualitative observation of the diffraction contour behavior with the specimen rotation around the Bragg axis permits us to indicate the directions of extreme superlattice period distortions for the chosen specimen area. The investigation is performed for the AlAs/AlGaAs superlattice, and the values of the extreme period distortions are calculated.
Библиографическая ссылка:
Amirzhanov R.M.
, Trukhanov E.M.
Investigation of Superlattice Period Inhomogeneity Using Quantitative Synchrotron Diffraction Topography
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.178-180. DOI: 10.1016/0168-9002(94)01656-9 WOS Scopus РИНЦ
Investigation of Superlattice Period Inhomogeneity Using Quantitative Synchrotron Diffraction Topography
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.178-180. DOI: 10.1016/0168-9002(94)01656-9 WOS Scopus РИНЦ
Даты:
Опубликована в печати: | 1 мая 1995 г. |
Опубликована online: | 23 февр. 2000 г. |
Идентификаторы БД:
Web of science | WOS:A1995QY84500043 |
Scopus | 2-s2.0-4244174340 |
РИНЦ | 30892751 |
Chemical Abstracts | 1995:539470 |
Chemical Abstracts (print) | 123:70840 |
OpenAlex | W2005178854 |