Investigation of Superlattice Period Inhomogeneity Using Quantitative Synchrotron Diffraction Topography Full article
Conference |
10th National Synchrotron Radiation Conference 11-15 Jul 1994 , Новосибирск |
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Journal |
Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002 |
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Output data | Year: 1995, Volume: 359, Number: 1-2, Pages: 178-180 Pages count : 3 DOI: 10.1016/0168-9002(94)01656-9 | ||||
Authors |
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Affiliations |
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Funding (1)
1 | The Ministry of Education and Science of the Russian Federation | 3-007/2 |
Abstract:
The development of a novel and simple method for the measurement of the structure parameter inhomogeneity of semiconductor superlattices using X-ray and synchrotron topography is presented. The qualitative observation of the diffraction contour behavior with the specimen rotation around the Bragg axis permits us to indicate the directions of extreme superlattice period distortions for the chosen specimen area. The investigation is performed for the AlAs/AlGaAs superlattice, and the values of the extreme period distortions are calculated.
Cite:
Amirzhanov R.M.
, Trukhanov E.M.
Investigation of Superlattice Period Inhomogeneity Using Quantitative Synchrotron Diffraction Topography
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.178-180. DOI: 10.1016/0168-9002(94)01656-9 WOS Scopus РИНЦ
Investigation of Superlattice Period Inhomogeneity Using Quantitative Synchrotron Diffraction Topography
Nuclear Instruments and Methods in Physics Research Section A. 1995. V.359. N1-2. P.178-180. DOI: 10.1016/0168-9002(94)01656-9 WOS Scopus РИНЦ
Dates:
Published print: | May 1, 1995 |
Published online: | Feb 23, 2000 |
Identifiers:
Web of science | WOS:A1995QY84500043 |
Scopus | 2-s2.0-4244174340 |
Elibrary | 30892751 |
Chemical Abstracts | 1995:539470 |
Chemical Abstracts (print) | 123:70840 |
OpenAlex | W2005178854 |