The Crystal Structure of Solid Solutions Formed in the HfO2-Sc2O3 Nanoscale System Научная публикация
| Журнал |
Journal of Crystal Growth
ISSN: 0022-0248 |
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| Вых. Данные | Год: 2019, Том: 523, Номер статьи : 125156, Страниц : 7 DOI: 10.1016/j.jcrysgro.2019.125156 | ||||
| Ключевые слова | A1. Characterization; A1. Nanostructures; A1. Solid solutions; A1. X-ray diffraction; B1. Alloys; B1. Rare earth compounds | ||||
| Авторы |
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| Организации |
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Информация о финансировании (1)
| 1 | Российский фонд фундаментальных исследований | 18-53-52009 (АААА-А18-118013190038-3) |
Реферат:
Here we report the results of studying the crystal structure of solid solutions films, obtained in the HfO2-Sc2O3 nano-scale system using of ALD process and volatile complex compounds such as of Hf(N(C2H5)2)4 and [Sc(C5H4CH3). A number of phases, that are thermodynamically equilibrium at high temperatures (≥1500 °C), have been synthesized at T = 300 °C. The formation of disordered solid solutions with a fluorite structure and the Hf3Sc4O12 compound with an ordered rhombohedral structural type were observed at varying the scandium concentration from 2 to 30 at.%. The results obtained allowed to conclude that the synthesis temperature is not a parameter that determines the structural types of synthesized phases in the system under study. The formation and stabilization of the nonequilibrium high-temperature phases of solid solutions is initiated by oxygen vacancies, which accumulate when Hf is replaced by scandium in the HfO2 lattice. To identify the synthesized phases a set of methods has been used: XPS, X-ray diffraction, electron diffraction (SAED modes) and HR TEM. Testing metal-insulator-semiconductor (MIS) structures with a series of films under study has demonstrated conventional dynamic volt-ampere characteristics. The high leakage current was observed for all samples with the disordered cubic structure. The injection-type hysteresis without any current leakage signs has been observed at the electric field strength of 106 V/cm for structures with the ordered rhombohedral phase of Hf3Sc4O12. © 2019
Библиографическая ссылка:
Smirnova T.P.
, Saraev A.A.
, Korolkov I.V.
, Kitchai V.N.
, Borisov V.O.
The Crystal Structure of Solid Solutions Formed in the HfO2-Sc2O3 Nanoscale System
Journal of Crystal Growth. 2019. V.523. 125156 :1-7. DOI: 10.1016/j.jcrysgro.2019.125156 WOS Scopus РИНЦ CAPlusCA OpenAlex
The Crystal Structure of Solid Solutions Formed in the HfO2-Sc2O3 Nanoscale System
Journal of Crystal Growth. 2019. V.523. 125156 :1-7. DOI: 10.1016/j.jcrysgro.2019.125156 WOS Scopus РИНЦ CAPlusCA OpenAlex
Даты:
| Поступила в редакцию: | 17 янв. 2019 г. |
| Принята к публикации: | 15 июл. 2019 г. |
| Опубликована online: | 16 июл. 2019 г. |
| Опубликована в печати: | 1 окт. 2019 г. |
Идентификаторы БД:
| Web of science: | WOS:000478562200013 |
| Scopus: | 2-s2.0-85069616068 |
| РИНЦ: | 41633006 |
| Chemical Abstracts: | 2019:1428726 |
| Chemical Abstracts (print): | 171:335927 |
| OpenAlex: | W2958166897 |