Synthesis of Magnetic Nanocomposite Films SiCxNyFez by Plasma-Enhanced Chemical Decomposition of a Gaseous Mixture of 1,1,1,3,3,3-hexamethyldisilazane, Ferrocene, and Helium | Sciact - CRIS-system of Boreskov Institute of Catalysis

Synthesis of Magnetic Nanocomposite Films SiCxNyFez by Plasma-Enhanced Chemical Decomposition of a Gaseous Mixture of 1,1,1,3,3,3-hexamethyldisilazane, Ferrocene, and Helium Full article

Journal

Journal of Structural Chemistry
ISSN: 0022-4766 , E-ISSN: 1573-8779

Output data

Year: 2020, Volume: 61, Number: 12, Pages: 1865-1875 Pages count : 11 DOI: 10.1134/S0022476620120045

Tags

1,1,1,3,3,3-hexamethyldisilazane; ferrocene; magnetic properties of composite films SiCxNyFez; plasma-enhanced chemical vapor deposition of films

Authors

Fainer N.I. ¹ , Plekhanov A.G. ¹ , Pushkarev R.V. ¹ , Shayapov V.R. ¹ , Maksimovskiy E.A. ¹ , Nadolinny V.A. ¹ , Korotaev E.V. ¹ , Kaichev V.V. ²

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2	Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

Abstract: A novel method is developed for the preparation of magnetic composite films with a complex composition SiCxNyFez using radio frequency plasma-enhanced chemical vapor decomposition of a gaseous mixture of 1,1,1,3,3,3-hexamethyldisilazane [(CH3)3Si]2NH, ferrocene (C5H5)2Fe, and helium. The films of various compositions are deposited in the temperature region 373-873 K. The dependence of physicochemical and functional properties of SiCxNyFez films on the synthesis conditions is studied with a number of modern methods such as IR spectroscopy, Raman spectroscopy, EDS, XPS, powder XRD. The IR spectra exhibit the same system of bonds as that in silicon carbonitride films, while the Raman spectra contain modes D and G indicating a presence of an impurity disordered graphite phase. It is established by the Faraday method and by electron paramagnetic resonance (EPR) that SiCxNyFez films prepared at 573-873 K are magnetic. According to the XPS data, the SiCxNyFez films may contain α-Fe, FeSi, or β-FeSi2 phases with similar binding energies; as a result, the composition of these films is difficult to determine. © 2020, Pleiades Publishing, Ltd.

Fainer N.I. , Plekhanov A.G. , Pushkarev R.V. , Shayapov V.R. , Maksimovskiy E.A. , Nadolinny V.A. , Korotaev E.V. , Kaichev V.V.
Synthesis of Magnetic Nanocomposite Films SiCxNyFez by Plasma-Enhanced Chemical Decomposition of a Gaseous Mixture of 1,1,1,3,3,3-hexamethyldisilazane, Ferrocene, and Helium
Journal of Structural Chemistry. 2020. V.61. N12. P.1865-1875. DOI: 10.1134/S0022476620120045 WOS Scopus РИНЦ AN OpenAlex

Файнер Н.И. , Плеханов А.Г. , Пушкарёв Р.В. , Шаяпов В.Р. , Максимовский Е.А. , Надолинный В.А. , Коротаев Е.В. , Каичев В.В.
Синтез магнитных композитных пленок SiCxNyFez плазмохимическим разложением газовой смеси 1,1,1,3,3,3-гексаметилдисилазана, ферроцена и гелия
Журнал структурной химии. 2020. Т.61. №12. С.1971-1981. DOI: 10.26902/jsc_id65932 РИНЦ OpenAlex

Submitted:	May 14, 2020
Accepted:	Jun 16, 2020
Published online:	Dec 25, 2020
Published print:	Dec 25, 2022

Web of science:	WOS:000602178800004
Scopus:	2-s2.0-85098067319
Elibrary:	45060385
Chemical Abstracts:	2020:2696411
OpenAlex:	W3115329394

DB	Citing
Scopus	3
Web of science	3
Elibrary	2
OpenAlex	3