Multifunctional X-ray Lithography Station at VEPP-3 Full article
| Conference |
The International Conference "Synchrotron and Free electron laser Radiation: generation and application" 04-07 Jul 2016 , Novosibirsk |
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| Journal |
Physics Procedia
ISSN: 1875-3892 |
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| Output data | Year: 2016, Volume: 84, Pages: 205-212 Pages count : 8 DOI: 10.1016/j.phpro.2016.11.036 | ||
| Tags | central beamstop; deep X-ray lithography; X-ray Lithographer; X-ray mask | ||
| Authors |
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| Affiliations |
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Abstract:
The multifunctional X-ray lithography “LIGA” station on beamline 0 at the VEPP-3 synchrotron source is part of the shared-use center “Siberian Synchrotron and Terahertz Radiation Center” (SSTRC) in Budker Institute of Nuclear Physics (BINP, Novosibirsk, Russia). The station is intended to exposure of resist layers on substrates of different shape and lateral dimensions of 1 to 10 cm. The development of process and re-equipment of the station goes forward, continuously. In this work we consider the current capabilities of the station; examples of microstructures fabricated are presented.
Cite:
Goldenberg B.G.
, Lemzyakov A.G.
, Nazmov V.P.
, Pindyurin V.F.
Multifunctional X-ray Lithography Station at VEPP-3
Physics Procedia. 2016.
V.84. P.205-212. DOI: 10.1016/j.phpro.2016.11.036
WOS
Scopus
РИНЦ
AN
OpenAlex
Multifunctional X-ray Lithography Station at VEPP-3
Physics Procedia. 2016.
V.84. P.205-212. DOI: 10.1016/j.phpro.2016.11.036
WOS
Scopus
РИНЦ
AN
OpenAlex
Files:
Full text from publisher
Dates:
| Submitted: | Dec 12, 2016 |
Identifiers:
| Web of science: | WOS:000392696400034 |
| Scopus: | 2-s2.0-85016306530 |
| Elibrary: | 29811823 |
| Chemical Abstracts: | 2016:2089572 |
| OpenAlex: | W2564058439 |