Multibeam X-ray Lithography to Form Deep Regular Microstructures Full article
| Journal |
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques
ISSN: 1027-4510 , E-ISSN: 1819-7094 |
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| Output data | Year: 2016, Volume: 10, Number: 1, Pages: 92-95 Pages count : 4 DOI: 10.1134/s1027451016010134 | ||||
| Tags | multibeam X-ray lithography; regular microstructures; synchrotron radiation; X-ray masks | ||||
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Abstract:
A method for the fabrication of regular microstructures with a high aspect ratio (for example, X-ray gratings) by direct multibeam vector recording in layers of an SU-8 resist is presented. An X-ray beam with a wavelength from 0.4 to 1.7 Å is used for recording. The features of the method are described. The fabricated samples of regular microstructures of the SU-8 resist and gold-plated X-ray masks are presented as finished products.
Cite:
Goldenberg B.G.
, Lemzyakov A.G.
, Zelinsky A.G.
, Nazmov V.P.
, Pindyurin V.F.
Multibeam X-ray Lithography to Form Deep Regular Microstructures
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. 2016. V.10. N1. P.92-95. DOI: 10.1134/s1027451016010134 WOS Scopus РИНЦ ANCAN OpenAlex
Multibeam X-ray Lithography to Form Deep Regular Microstructures
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. 2016. V.10. N1. P.92-95. DOI: 10.1134/s1027451016010134 WOS Scopus РИНЦ ANCAN OpenAlex
Original:
Гольденберг Б.Г.
, Лемзяков А.Г.
, Зелинский А.Г.
, Назьмов В.П.
, Пиндюрин В.Ф.
Многопучковая рентгенолитография для формирования глубоких регулярных микроструктур
Поверхность. Рентгеновские, синхротронные и нейтронные исследования. 2016. №1. С.64–67. DOI: 10.7868/S0207352816010133 РИНЦ OpenAlex
Многопучковая рентгенолитография для формирования глубоких регулярных микроструктур
Поверхность. Рентгеновские, синхротронные и нейтронные исследования. 2016. №1. С.64–67. DOI: 10.7868/S0207352816010133 РИНЦ OpenAlex
Dates:
| Submitted: | Mar 20, 2015 |
| Published print: | Jan 1, 2016 |
| Published online: | Feb 19, 2016 |
Identifiers:
| Web of science: | WOS:000378495100014 |
| Scopus: | 2-s2.0-84958743345 |
| Elibrary: | 26859338 |
| Chemical Abstracts: | 2016:281056 |
| Chemical Abstracts (print): | 175:197083 |
| OpenAlex: | W2379729307 |