Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography | Sciact - CRIS-system of Boreskov Institute of Catalysis

Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography Full article

Journal

Optoelectronics, Instrumentation and Data Processing
ISSN: 8756-6990 , E-ISSN: 1934-7944

Output data

Year: 2019, Volume: 55, Number: 2, Pages: 115–125 Pages count : 11 DOI: 10.3103/S875669901902002X

Tags

deep X-ray lithography; LIGA technology; microstructures; quasi-optical filters; terahertz range

Authors

Gentselev A.N. ¹ , Kuznetsov S.A. ^1,2,3 , Dultsev F.N. ^3,4 , Goldenberg B.G. ¹ , Zelinsky A.G. ⁵ , Kondratyev V.I. ¹ , Tanygina D.S. ^2,6

Affiliations

1	Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrentieva 11, Novosibirsk, 630090 Russia
2	Novosibirsk Department of Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, “Design and Technology Institute of Applied Microelectronics”, pr. Akademika Lavrentieva 2/1, Novosibirsk, 630090 Russia
3	Novosibirsk State University, ul. Pirogova 2, Novosibirsk, 630090 Russia
4	dRzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, pr. Akademika Lavrentieva 13, Novosibirsk, 630090 Russia
5	Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, ul. Kutateladze 18, Novosibirsk, 630128 Russia
6	Far Eastern Federal University, ul. Sukhanova 8, Vladivostok, 690091 Russia

A method for fabricating high-pass terahertz quasi-optical filters in the form of thick (up to 1 mm in thickness) self-bearing copper microstructures of subwavelength topology is described. This method is based on forming a high-aspect-ratio mask of SU-8 resist on a silicon wafer via deep X-ray lithography through a tungsten X-ray mask followed by electroplating a copper layer through the resistive mask. An example of a 212-µm thick structure with a cutoff frequency of 0.42 THz having the geometry of hexagon-shaped through-holes arranged on a triangular lattice is considered. The results of broadband THz characterization and electromagnetic analysis of the structure fabricated are presented.

Gentselev A.N. , Kuznetsov S.A. , Dultsev F.N. , Goldenberg B.G. , Zelinsky A.G. , Kondratyev V.I. , Tanygina D.S.
Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography
Optoelectronics, Instrumentation and Data Processing. 2019. V.55. N2. P.115–125. DOI: 10.3103/S875669901902002X WOS Scopus РИНЦ OpenAlex

Генцелев А.Н. , Кузнецов С.А. , Дульцев Ф.Н. , Гольденберг Б.Г. , Зелинский А.Г. , Кондратьев В.И. , Таныгина Д.С.
Реализация терагерцовых фильтров высоких частот на основе цельнометаллических микроструктур с использованием глубокой рентгенолитографии
Автометрия. 2019. Т.55. №2. С.14-27. DOI: 10.15372/AUT20190202 РИНЦ OpenAlex

Submitted:	Oct 22, 2018
Accepted:	Dec 24, 2018
Published print:	Mar 1, 2019
Published online:	Jun 14, 2019

Web of science:	WOS:000471658400002
Scopus:	2-s2.0-85067345698
Elibrary:	41643330
OpenAlex:	W2952023856

DB	Citing
Web of science	5
Scopus	6
OpenAlex	5