Determination of the Infrared Absorption Cross-Section of the Stretching Vibrations of Ge–O Bonds in GeOx Films | Sciact - CRIS-система Института катализа

Determination of the Infrared Absorption Cross-Section of the Stretching Vibrations of Ge–O Bonds in GeOx Films Научная публикация

Журнал

Results in Chemistry
, E-ISSN: 2211-7156

Вых. Данные

Год: 2022, Том: 4, Номер статьи : 100461, Страниц : 5 DOI: 10.1016/j.rechem.2022.100461

Ключевые слова

Absorption cross-section; FTIR spectroscopy; Ge-O bonds; GeOx films

Авторы

Zhang F. ¹ , Volodin V.A. ^1,2 , Astankova K.N. ² , Kamaev G.N. ² , Azarov I.A. ^1,2 , Prosvirin I.P. ³ , Vergnat M. ⁴

Организации

1	Novosibirsk State University, Pirogova Str., 2, 630090 Novosibirsk, Russia
2	Rzhanov Institute of Semiconductor Physics SB RAS, Lavrentiev Ave., 13, Novosibirsk, 630090, Russian Federation
3	Boreskov Institute of Catalysis SB RAS, Lavrentiev Ave., 5, 630090 Novosibirsk, Russia
4	Université de Lorraine, CNRS, IJL, F-54000 Nancy, France

Информация о финансировании (2)

1	Российский научный фонд	22-19-00369
2	Министерство науки и высшего образования Российской Федерации (с 15 мая 2018)	FWGW-2022-0011 (122041400256-9)

The cross-section of the infrared (IR) absorption of the Ge-O stretching mode in both GeO2 and GeOx films was determined. The GeO2 film was obtained by thermal oxidation of germanium while the GeOx film was obtained by physical vapor deposition. The latter was then annealed at a temperature of 550 °C for 30 min. Both the as-deposited and the annealed films were studied using IR absorption spectroscopy, Raman spectroscopy, ellipsometry and X-ray photoelectron spectroscopy. We found the absorption cross-section is about 2 ÷ 2.6·10–19 cm−2 for the GeO2 films and 0.8·10−19 cm−2 for the GeOx (x ∼ 1.1) film. © 2022 The Author(s)

Zhang F. , Volodin V.A. , Astankova K.N. , Kamaev G.N. , Azarov I.A. , Prosvirin I.P. , Vergnat M.
Determination of the Infrared Absorption Cross-Section of the Stretching Vibrations of Ge–O Bonds in GeOx Films
Results in Chemistry. 2022. V.4. 100461 :1-5. DOI: 10.1016/j.rechem.2022.100461 Scopus РИНЦ CAPlusCA OpenAlex

Опубликована в печати:	1 янв. 2022 г.
Поступила в редакцию:	3 июн. 2022 г.
Принята к публикации:	30 июл. 2022 г.
Опубликована online:	3 авг. 2022 г.

Scopus:	2-s2.0-85135691943
РИНЦ:	49957269
Chemical Abstracts:	2022:2422429
Chemical Abstracts (print):	180:211336
OpenAlex:	W4289528746

БД	Цитирований
Scopus	5
РИНЦ	7
OpenAlex	7